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Nonequilibrium Processes in Partially Ionized Gases pp 451–458Cite as

Problems in the Experimental Determination of Electron Energy Distribution Function in RF Discharges

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Part of the book series: NATO ASI Series ((NSSB,volume 220))

Abstract

The measurement of electron energy distribution function (EEDF) in RF discharges is a topic of great interest for understanding the processes taking place in a kind of discharge where sheath processes and inelastic and superelastic collisions are thought to play a fundamental role in shaping the EEDF, giving to it a pronounced non-maxwellian character as well as a noticeable spatial dependence /1/.

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Author information

Authors and Affiliations

  1. Centro di Studio per la Chimica dei Plasmi Dipartimento di Chimica, Università di Bari, Trav 200 Re David, 4, 70126, Bari, Italy

    G. Dilecce, M. Capitelli, S. De Benedictis & C. Gorse

Authors
  1. G. Dilecce
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  2. M. Capitelli
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  3. S. De Benedictis
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  4. C. Gorse
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Editor information

Editors and Affiliations

  1. Department of Chemistry and Centro di Studio per la Chimica dei Plasmi del CNR, University of Bari, Bari, Italy

    Mario Capitelli

  2. Lawrence Livermore National Laboratory, Livermore, California, USA

    J. Norman Bardsley

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Dilecce, G., Capitelli, M., De Benedictis, S., Gorse, C. (1990). Problems in the Experimental Determination of Electron Energy Distribution Function in RF Discharges. In: Capitelli, M., Bardsley, J.N. (eds) Nonequilibrium Processes in Partially Ionized Gases. NATO ASI Series, vol 220. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-3780-9_34

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  • DOI: https://doi.org/10.1007/978-1-4615-3780-9_34

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-6685-0

  • Online ISBN: 978-1-4615-3780-9

  • eBook Packages: Springer Book Archive

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