Abstract
The purpose of this chapter is to summarize and compare available information about the six major techniques for surface compositional analysis (SIMS, SNMS, ISS, RBS, AES, and XPS) in tabular form and in brief narratives. It is assumed that the reader is familiar with the principles of these techniques. Detailed information on the ion spectroscopies (SIMS, SNMS, ISS, and RBS) is presented in earlier chapters of this volume; information on the electron spectroscopies can be found in the references given below and in a forthcoming volume of this series. Acronyms and abbreviations used in this chapter are defined in Chapter 1 of this volume.
Keywords
- Surface Analysis
- Lateral Resolution
- Nuclear Reaction Analysis
- Compositional Depth Profile
- Vacuum Requirement
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Powell, C.J., Hercules, D.M., Czanderna, A.W. (1991). Comparisons of SIMS, SNMS, ISS, RBS, AES, and XPS Methods for Surface Compositional Analysis. In: Czanderna, A.W., Hercules, D.M. (eds) Ion Spectroscopies for Surface Analysis. Methods of Surface Characterization, vol 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-3708-3_7
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DOI: https://doi.org/10.1007/978-1-4615-3708-3_7
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