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Ion Scattering Spectroscopy

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Ion Spectroscopies for Surface Analysis

Part of the book series: Methods of Surface Characterization ((MOSC,volume 2))

Abstract

Surface characterization by ion scattering spectroscopy means the determination of the atomic masses and their geometric arrangement on a solid surface. A low-energy ion beam is a well-suited probe for such investigations because of the strong interaction between the ions in the considered energy regime and the surface atoms. “Low-energy” here refers to a range from a few hundred electron volts up to several keV. There are some essential features of ion scattering spectroscopy (ISS) or low-energy ion scattering (LEIS) which define its usefulness as a surface analytical method.

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  1. Surface Physics Department, Max-Planck-Institut für Plasmaphysik, EURATOM Association, D-8046, Garching bei München, Germany

    E. Taglauer

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  1. Solar Energy Research Institute, Golden, Colorado, USA

    A. W. Czanderna

  2. University of Pittsburgh, Pittsburgh, Pennsylvania, USA

    David M. Hercules

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Taglauer, E. (1991). Ion Scattering Spectroscopy. In: Czanderna, A.W., Hercules, D.M. (eds) Ion Spectroscopies for Surface Analysis. Methods of Surface Characterization, vol 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-3708-3_6

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