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Ion Spectroscopies for Surface Analysis pp 311–361Cite as

Rutherford Backscattering and Nuclear Reaction Analysis

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Part of the book series: Methods of Surface Characterization ((MOSC,volume 2))

Abstract

This chapter deals with the use of high-energy ion beams in the characterization of solids. In this context “high-energy” refers to positive ions with incident kinetic energies of greater than 25 keV and extends to the region of many MeV. Historically this regime is associated with nuclear physics and the basic processes are of a nuclear type. For surface analysis one picks out the subset of well-understood nuclear processes to apply to materials problems. The primary advantage of these ion scattering techniques is quantitative analysis, which, in turn, results from the successful understanding of these processes by the nuclear physics community. A second main advantage is in-depth profiling in a nondestructive manner.

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Author information

Authors and Affiliations

  1. AT & T Bell Laboratories, Murray Hill, New Jersey, 07974, USA

    L. C. Feldman

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  1. L. C. Feldman
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Editor information

Editors and Affiliations

  1. Solar Energy Research Institute, Golden, Colorado, USA

    A. W. Czanderna

  2. University of Pittsburgh, Pittsburgh, Pennsylvania, USA

    David M. Hercules

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© 1991 Springer Science+Business Media New York

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Feldman, L.C. (1991). Rutherford Backscattering and Nuclear Reaction Analysis. In: Czanderna, A.W., Hercules, D.M. (eds) Ion Spectroscopies for Surface Analysis. Methods of Surface Characterization, vol 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-3708-3_5

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  • DOI: https://doi.org/10.1007/978-1-4615-3708-3_5

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-6649-2

  • Online ISBN: 978-1-4615-3708-3

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