Abstract
A knowledge of the manner and ease with which atoms can migrate in a II–VI crystal lattice is of both fundamental and technological importance. At the fundamental level the diffusion process may involve non-defect or defect mechanisms: experimental diffusivities can help to identify the type of mechanism and underpin theoretical understanding of atom movements and defects. Diffusion is important in both material and device technology through control of non-stoichiometry, impurity doping and compositional interdiffusion (via gradients in alloy composition). The introduction during the past decade of epitaxial growth techniques and their use in the fabrication of low-dimensional structures has revealed a need for diffusion studies at much lower temperatures and in much smaller spatial regions compared with bulk materials (i.e. material ⩾1 µm in extent). It is easily seen for example that in a period of 103s (e.g. growth of a multiple quantum well (MQW)) diffusivities must be ⩽ 10-18 cm2 s-1 if diffusional spread should not exceed ~ 10 Å. Over a period of a year diffusivities must be ⩽ 10-22 cm2 s-1 to contain any spread to < 10 Å.
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References
Sharma, B.L. (1989) Defect Diffus. Forum, 64–65, 77.
Shaw, D. (1988) J. Cryst. Growth, 86, 778.
Shaw, D. (1973) In Atomic Diffusion in Semiconductors (ed. D. Shaw), Plenum, London, Chapter 1.
Dzhafarov, T.D. (1989) Phys. Status Solidi B, 155, 11.
Davis, G.D., Beck, W.A., Kilday, D.G., McKinley, J.T. and Margaritondo, G. (1989) J. Vac. Sci. Technol, A, 7, 870.
Raisanen, A., Peterman, D.J., Wall, A., Chang, S., Haugstad, G., Yu, X. and Franciosi, A. (1989) Solid State Commun., 71, 585.
Pandey, K.C. (1986) Phys. Rev. Lett., 57, 2287.
Pantelides, S.T. (1990) In Diffusion in Materials, NATO ASI Series Vol. 179 (eds A.L. Laskar, J.L. Boquet, G. Brébec and C. Monty), Kluwer, Dordrecht, p. 523.
Kröger, F.A. (1974) The Chemistry of Imperfect Crystals, 2nd edn, North-Holland, Amsterdam, p. 302.
Brouwer, G. (1954) Philips Res. Rep., 9, 366.
Shaw, D. (1984) J. Phys. C, 17, 4759.
Kukk, P.L. and Aarna, H.A. (1982) Phys. Status Solidi A, 69, K109.
Kukk, P.L., Aarna, H.A. and Voogne, M.P. (1981) Phys. Status Solidi A, 63, 389.
Selim, F.A. and Krxger, F.A. (1977) J. Electrochem. Soc., 124, 401.
Ido, T., Heurtel, A., Triboulet, R. and Marfaing, Y. (1987) J. Phys. Chem. Solids, 48, 781.
Boquet, J.L., Brébec, G. and Limoge, Y. (1983) In Physical Metallurgy, 3rd edn (eds R.W. Cahn and P. Haasen), North-Holland, Amsterdam, Chapter 8.
Tang, M.F.S. and Stevenson, D.A. (1990) J. Phys. Chem. Solids, 51, 563.
Dzhafarov, T.D. (1977) Phys. Stat. Sol. A, 42, 11.
Abdullaev, G.B. and Dzhafarov, T.D. (1987) Atomic Diffusion in Semiconductor Structures, Harwood, Chur, Switzerland. Chapter 2.
Queisser, H.J. (1961) J. Appl. Phys., 32, 1776.
Purdy, G.R. (1990) In Diffusion in Materials, NATO ASI Series Vol. 179 (eds A.L. Laskar, J.L. Boquet, G. Brébec and C. Monty), Kluwer, Dordrecht, p. 309.
Buonomo, A. and Di Bello, C. (1988) Solid State Electron. 31, 1555.
Meijer, P.H.E., Keskin, M. and Napiorkowski, M. (1988) J. Appl. Phys., 63, 1608.
Vasilevskii M.I., and Pantaleev, V.A. (1984) Sov. Phys. Solid State, 26, 33.
Hildebrand, O. (1982) Phys. Status. Solidi A, 72, 575.
Rothman, S.J. (1990) In Diffusion in Materials, NATO ASI Series Vol. 179 (eds A.L. Laskar, J.L. Boquet, G. Brébec and C. Monty), Kluwer, Dordrecht, p. 269.
Yeh, T.H. (1973) In Atomic Diffusion in Semiconductors (ed. D. Shaw), Plenum, London, Chapter 4.
Tuck, B. (1988) Atomic Diffusion in III–VI Semiconductors, Hilger, Bristol, Chapter 2.
Taylor, H.F., Smiley, V.N., Martin, W.E. and Pawka, S.S. (1972) Phys. Rev. B, 5, 1467.
Aven, M. and Halstead, R.E. (1965) Phys. Rev., 137, A228.
Zanio, K. (1970) J. Appl. Phys., 41, 1935.
Fleming, R.M., McWhan, D.B., Gossard, A.C., Wiegmann, W. and Logan, R.A. (1980) J. Appl. Phys., 51, 357.
Staudenmann, J.L., Horning, R.D., Knox, R.D., Reno, J., Sou, I.K., Faurie, J.P. and Arch, D.K. (1986) In Semiconductor Based Heterostructures (eds M.L. Green, J.E.E. Baglin, G.Y. Chin, H.W. Deckman, W. Mayo and D. Narasinham) Metallurgical Society, of AIME, Warrendale, PA, p. 41.
Imai, A., Kobayashi, M., Dosho, S., Kongai, M. and Takahashi, K. (1988) J. Appl. Phys., 64, 647.
van de Walle, G.F.A., van IJzendoorn, L.J., van Gorkum, A.A., van den Heuvel, R.J. and Theunissen, A.M.L. (1990) Semicond. Sci. Technol., 5, 345.
Kim, Y., Ourmazd, A. and Feldman, R.D. (1990) J. Vac. Sci. Technol. A, 8, 1116.
Schubert, E.F., Tu, C.W., Kopf, R.F., Kuo, J.M. and Lunardi, L.M. (1989) Appl. Phys. Lett., 54, 2592.
Jones, E.D. (1972) J. Phys. Chem. Solids. 33, 2063.
Sysoev, L.A., Fel’dman, A.Ya., Koraleva, A.D. and Kravchenko, N.G. (1969) Inorg. Mater., USA, 5, 1889.
Jones, E.D. and Mykura, H. (1978) J. Phys. Chem. Solids, 39, 11.
Jones, E.D. and Mykura, H. (1980) J. Phys. Chem. Solids, 41, 1261.
Berding, M.A., van Schilfgaarde, M., Paxton, A.T. and Sher, A. (1990) J. Vac. Sci. Technol. A, 8, 1103.
Zmija, J. (1973) Acta Physi. Pol. A, 43, 345.
Williams, V.A. (1972) J. Mater. Sci, 7, 807.
Astles, M.G. and Blackmore, G. (1986) J. Electron. Mater., 15, 287.
Secco, E.A. (1958) J. Chem. Phys., 29, 406.
Jones, E.D. and Stewart, N.M. (1989) J. Cryst. Growth, 96, 40, and private communication.
Borsenberger, P.M., Stevenson, D.A. and Burmeister, R.A. (1967) In II-VI Semiconducting Compounds (ed. D.G. Thomas), Benjamin, New York, p. 439.
Jones, E.D., Stewart, N.M. and Thambipillai, V. (1989) J. Cryst. Growth, 96, 453.
Jamil, N.Y., Shaw, D. and Lunn, B., to be published.
Zanio, K. (1970) J. Appl. Phys., 41, 1935.
Rud’, Yu.V. and Sanin, K.V. (1972) Sov. Phys. Semicond., 6, 764.
Rud’ Yu.V. and Sanin, K.V. (1974) Inorg. Mater., 10, 839.
Boyn, R, Goede, O. and Kushnerus, S. (1965) Phys. Status Solidi, 12, 57.
Kumar, V. and Kroger, F.A. (1971) J. Solid State Chem., 3, 406.
Stevenson, D.A. (1973) In Atomic Diffusion in Semiconductors (ed. D. Shaw), Plenum, London, Chapter 7.
Chern, S.S. and Kroger, F.A. (1975) J. Solid. State Chem., 14, 299.
Tuck, B. (1988) Atomic Diffusion in III–VI Semiconductors, Hilger, Bristol.
Lukaszewicz, T. and Zmija, J. (1980) Phys. Status Solidi A, 62, 695.
Martin, P. and Bontemps, A. (1980) J. Phys. Chem. Solids, 41, 1171.
Svob, L., Heurtel, A. and Marfaing, Y. (1988) J. Cryst. Growth, 86, 815.
Svob, L. and Marfaing, Y. (1982) J. Cryst. Growth, 59, 276.
Woodbury, H.H. and Aven, M. (1968) J. Appl. Phys., 39, 5485.
Panchuk, O.E., Grytsiv, V.l. and Belotskii, D.P. (1975) Inorg. Mater., USA, 11, 1510.
Teramoto, I. and Takayanagi, S. (1962) J. Jpn. Phys. Soc., 17, 1137.
Akutagawa, W., Turnbull, D., Chu, W.K. and Mayer, J.W. (1975) J. Phys. Chem. Solids, 36, 521.
Nelkowski, H. and Bollman, G. (1969) Z. Naturforsch. A, 24, 1302.
Zmija, J. and Demianiuk, M. (1971) Acta Phys. Pol. A, 39, 539.
Mann, H., Linker, G. and Meyer, O. (1972) Solid State Commun., 11, 475.
Yamaguchi, M. and Shigematsu, T. (1978) Jpn. J. Appl. Phys., 17, 335. (1978).
Lukaszewicz, T. (1982) Phys. Status Solidi A, 73, 611.
Szeto, W. and Somorjai, G.A. (1966) J. Chem. Phys., 44, 3490.
Clarke, R.L. (1959) J. Appl. Phys., 30, 957.
Woodbury, H.H. (1965) J. Appl. Phys., 36, 2287.
Slinkina, M.V., Zhakovskii, V.M. and Shukovskaya, A.S. (1984) Sov. Phys. Solid State, 26, 1361.
Chamonal, J.P., Molva, E., Pautrat, J.L. and Revoil, L. (1982) J. Cryst. Growth, 59, 297.
Hage-Ali, M., Mitchell, I.V., Grob, J.J. and Siffert, P. (1973) Thin Solid Films, 19, 409.
Musa, A., Ponpon, J.P., Grob, J.J., Hage-Ali, M., Stuck, R. and Siffert, P. (1983) J. Appl Phys., 54, 3260.
Nebauer, E. (1968) Phys. Status Solidi, 29, 269.
Nebauer, E. and Quednau, F. (1984) Phys. Status. Solidi A, 26, 225.
Sullivan, G.A. (1969) Phys. Rev., 184, 796.
Sullivan, J.L. (1973) J. Phys. D, 6, 552.
Sullivan, J.L. (1975) Thin Solid Films, 25, 245.
Yokozawa, M., Kato, H. and Takayanagi, S. (1968) Denki Kakagu, 36, 282.
Takenoshita, H., Kido, K. and Sawai, K. (1986) Jpn. J. Appl. Phys., 25, 1610.
Bryant, F.J., Krier, A. and Zhong, G.Z. (1985) Solid State Electron., 28, 847.
Watson, E. and Shaw, D. (1983) J. Phys. C, 16, 515.
Aven, M. and Kreiger, E.L. (1970) J. Appl. Phys., 41, 1930.
Bjerkeland, H. and Holwech, I. (1972) Phys. Norv., 6, 139.
Muranoi, T. and Furukoshi, M. (1981) Thin Solid Films, 86, 307.
Kun, Z.K. and Robinson, R.J. (1976) J. Electron. Mater., 5, 23.
Chern, S.S. and Kroger, F.A. (1974) Phys. Status Solidi A, 25, 215.
Jones, E.D. and Vere, D.M. (1985) J. Cryst. Growth, 72, 184.
Woodbury, H.H., (1967) In II–VI Semiconducting Compounds (ed. D.G. Thomas), Benjamin, New York, p. 244.
Hall, R.B. and Woodbury, H.H. (1968) J. Appl. Phys., 39, 5361.
Panchuk, O.E., Shcherbak, L.P, Feichuk, P.I. and Savitskii, A.V. (1978) Inorg. Mater., USA, 14, 41,
Shaw, D. and Watson, E. (1984) J. Phys. C, 17, 4945.
Mandel, G. and Morehead, F.F. (1964) Appl. Phys. Lett., 4, 143.
Yokota, K, Yoshikawa, T., Inano, S., Morioka, T. and Katayama, S. (1990) J. Appl. Phys., 56, 866.
Vodovatov, F.F., Indenbaum, C.V. and Vanyukov, A.V. (1970) Sov. Phys. Solid State, 12, 17.
Girton, D.G. and Anderson, W.W. (1969) Trans. Metall. Soc. AIME, 245, 465.
Panchuk, O.E., Fesh, R.N., Savitskii, A.V. and Shcherbak, L.P. (1981) Inorg. Mater. USA, 17, 1004.
Golding, T.D., Martinka, M. and Dinan, J.H. (1988) J. Appl. Phys., 64, 1873.
Kassel, L., Abad, H., Garland, J.W., Raccah, P.M., Potts, J.E., Haase, M.A. and Cheng, H. (1990) Appl. Phys. Lett., 56, 42.
Martin, W.E. (1973) J. Appl. Phys., 44, 5639.
Blömer, F. and Leute, V. (1973) Z. Phys. Chem., N.F., 85, 47.
Leute, V. and Blömer, F. (1974) Z. Phys. Chem. N.F., 89, 15.
Woodbury, H.H. and Hall, R.B. (1967) Phys. Rev., 157, 641.
Nakano, M. and Igaki, K. (1982) Trans. Jpn. Inst. Met., 23, 103.
Nebauer, E. (1973) Phys. Status Solidi A, 19, K183.
Biter, W.F. and Williams, F. (1971) J. Lumin., 3, 395.
Asami, S, Ebina, A. and Takahashi, P. (1978) Jpn. J. Appl. Phys., 17, 779.
Al-Dallal, S. (1977) Phys. Status Solidi A, 44, 183.
Shaw, D. (1990) in Diffusion in Materials, NATO ASI Series Vol. 179 (eds A.L. Laskar, J.L. Bouquet, G. Brébec and C. Monty, Kluwer, Dordrecht, p. 557.
Morgan-Pond, C.G., Schick, J.T. and Goettig, S. (1989) J. Vac. Sci Tchnol. A7, 354.
Schick, J.T. and Morgan-Pond, C.G. J. (1990) J. Vac. Sci. Technol A, 8, 1108.
Lorenz, M.R. (1967) Physics and Chemistry of II–VI Compounds (eds M. Aven and J.S. Prener), North-Holland, Amsterdam, Table 2.3.
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Shaw, D. (1992). Self- and impurity diffusion processes in widegap II–VI materials. In: Ruda, H.E. (eds) Widegap II–VI Compounds for Opto-electronic Applications. Electronic Materials Series, vol 1. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-3486-0_10
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DOI: https://doi.org/10.1007/978-1-4615-3486-0_10
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