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Forming Electron Beams of Submicron Cross Section

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Book cover The Physics of Submicron Lithography

Part of the book series: Microdevices ((MDPF))

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Abstract

In this chapter we will examine the issues in obtaining bright sources of electrons and forming electron beams of submicron cross section. Thermionic emission and field emission are the usual methods of obtaining electron beams having a brightness on the order of 106 A/cm2-steradian. The first sections of this chapter discuss the physics of these processes (Sections 1–5). Subsequent sections discuss electron optics as a method of forming a beam having a submicron cross section; in this presentation we will in part follow the sources.(1–8)

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References

  1. V. E. Cosslett, Introduction to Electron Optics [Russian translation], Inostrannaya Literatura, Moscow (1950).

    Google Scholar 

  2. L. A. Artsimovich and S. Yu. Luk’yanov, Charged Particle Motion in Electric and Magnetic Fields [in Russian], Nauka, Moscow (1978).

    Google Scholar 

  3. P. W. Hawkes, Electron Optics and Electron Microscopy [Russian translation], Mir, Moscow (1974).

    Google Scholar 

  4. F. R. Brewer (editor), Electron Beam Technology in Microelectronic Fabrication, Academic Press, New York (1980).

    Google Scholar 

  5. S. Reed, Electron Probe Microanalysis [Russian translation], Mir, Moscow (1979).

    Google Scholar 

  6. L. A. Baranova and S. Ya. Yavor, Electrostatic Electron Lenses [in Russian], Nauka, Moscow (1986).

    Google Scholar 

  7. V. K. Popov and S. N. Yachmenev, The Design and Analysis of Electron and Ion Lithography Equipment [in Russian], Radio i Svyaz’, Moscow (1985).

    Google Scholar 

  8. I. Brodie and J. J. Muray, The Physics of Microfabrication, Plenum Press (1982).

    Google Scholar 

  9. C. Kittel, Introduction to Solid State Physics [Russian translation], Nauka, Moscow (1978).

    Google Scholar 

  10. D. R. Herriot and G. R. Brewer, Electron Beam Technology in Microelectronic Fabrication, Academic Press, New York (1980), pp. 141–216.

    Google Scholar 

  11. D. M. Goebel, Y. Hirooka, and T. A. Sketchley, Rev. Sci. Instrum., 56, No. 9, 1717–1722 (1985); D. M. Goebel, Y. Hirooka, and G. A. Campbell, Rev. Sci. Instrum., 56, No. 10, 1888–1893 (1985).

    Article  ADS  Google Scholar 

  12. R. L. Gordon, J. Appl. Phys., 56, No. 1, 810–813 (1984).

    Article  ADS  Google Scholar 

  13. R. Chow and W. A. Tiller, J. Appl. Phys., 55, No. 5, 1339–1352 (1984).

    Article  ADS  Google Scholar 

  14. K. W. Hadley and P. J. Donders, J. Appl. Phys., 57, No. 7, 2617–2625 (1985).

    Article  ADS  Google Scholar 

  15. R. S. Khairnar, D. S. Joag, S. K. Kulkarni, A. S. Nigavecar, and P. L. Kanitkar, Rev. Sci. Instrum., 55, No. 9, 1505–1507 (1984).

    Article  ADS  Google Scholar 

  16. Y. Furukawa, M. Yamabe, T. Ishizuka, and T. Inagaki, J. Appl. Phys., 52, No. 1, 533–534 (1981).

    Article  ADS  Google Scholar 

  17. A. R. Shul’man and S. A. Fridrikhov, Secondary Emission Methods in the Study of Solid State [in Russian], Nauka, Moscow (1977).

    Google Scholar 

  18. L. N. Dobretsov, Electron and Ion Emission [in Russian], Gostekhizdat, Moscow-Leningrad (1952).

    Google Scholar 

  19. H. Boersch, Z. Phys., B 139, 115–146 (1954).

    Article  Google Scholar 

  20. W. Leger, Z. Phys., B 171, 424–435 (1963).

    Article  Google Scholar 

  21. V. A. Zhukov and K. A. Kalabushev, Mikroelektronika, 11, No. 4, 316–325 (1982).

    Google Scholar 

  22. M. I. Elinson and G. F. Vasil’ev, Field Emission of Electrons [in Russian], Fizmatgiz, Moscow (1958).

    Google Scholar 

  23. A. A. Sokolov, Yu. M. Loskutov, and I. M. Ternov, Quantum Mechanics [in Russian], Uchpedgiz, Moscow (1962).

    Google Scholar 

  24. L. W. Nordheim, Phyz. Z., B 30, No. 4, 177–196 (1929).

    MATH  Google Scholar 

  25. K. Fujii, S. Zaima, Y. Shibata, H. Adachi, and S. Otani, J. Appl. Phys., 57, No. 5, 1723–1728 (1985); H. Adachi, K. Fujii, S. Zaima, Y. Shibata, S. Oshima, S. Otani, and Y. Ischizawa, Appl. Phys. Lett., 43, 540–543 (1980).

    Article  ADS  Google Scholar 

  26. J. C. Wolfe, IEEE J., SC-15, No. 4, 540–543 (1980).

    MathSciNet  Google Scholar 

  27. H. Pinna, K. Liang, M. Denizart, and B. Jouffrey, Rev. Phys. Appl., 18, 659–665 (1983).

    Article  Google Scholar 

  28. B. V. Bondarenko, Yu. L. Rybakov, E. P. Sheshin, and A. A. Shchuka, Electronic Technology, Ser. 4: High Vacuum Electronic and Gas Discharge Devices, No. 4, 1–56 (1981).

    Google Scholar 

  29. B. V. Bondarenko, E. P. Sheshin, and A. A. Shchuka, Foreign Electronic Technology, No. 2, 3–43 (1979).

    Google Scholar 

  30. B. V. Bondarenko, Electronic Technology, Ser. 4: High Vacuum Electronic and Gas Discharge Devices, No. 6, 3–9 (1982).

    Google Scholar 

  31. B. V. Bondarenko, Electronic Technology, Ser. 1: Very High Frequency Electronics, No. 9, 3–9 (1980).

    Google Scholar 

  32. D. A. Kirkpatrick, R. E. Shefer, and G. Bekefi, J. Appl. Phys., 57, No. 11, 5011–5016 (1985).

    Google Scholar 

  33. K. H. Bayliss and R. V. Latham, Vacuum, 35, No. 6, 211–217 (1985).

    Article  Google Scholar 

  34. D. M. Goebel, Y. Hirooka, and G. A. Campbell, Rev. Sci. Instrum., 56, No. 10, 1888–1893 (1985).

    Article  ADS  Google Scholar 

  35. D. B. Langmuir, Proc. IRE, No. 25, 971–991 (1937).

    Google Scholar 

  36. V. S. Lukoshkov, Zh. Tekh. Fiz., 6, 26–30 (1936).

    Google Scholar 

  37. I. E. Tamm, Fundamentals of Electricity [in Russian], Gostekhizdat, Moscow (1954).

    Google Scholar 

  38. J. Caldwell, J. Appl. Phys., 57, No. 1, 6–9 (1985).

    Article  ADS  Google Scholar 

  39. K. Saito, T. Okubo, T. Takamoto, Y. Uno, and M. Kondo, J. Vac. Sci. Technol., A4, No. 4, 1913–1917 (1986).

    ADS  Google Scholar 

  40. G. F. Rempfer, J. Appl. Phys., 57, No. 7, 2385–2401 (1985).

    Article  ADS  Google Scholar 

  41. M. Szilagyi, S. J. Yakowitz, and M. O. Duff, Appl. Phys. Lett., 44, No. 1, 7–9 (1984).

    Article  ADS  Google Scholar 

  42. M. Szilagyi, Appl. Phys. Lett., 45, No. 5, 499–501 (1985).

    Article  ADS  Google Scholar 

  43. G. Hess and S. Humphries, Jr., J. Appl. Phys., 60, No. 5, 1569–1576 (1986).

    Article  ADS  Google Scholar 

  44. P. Loschialpo, W. Namkung, M. Reiser, and J. D. Lawson, J. Appl. Phys., 57, No. 1, 10–17 (1985).

    Article  ADS  Google Scholar 

  45. E. L. O’Neill, Introduction to Statistical Optics, Addison-Wesley, Palo Alto (1963).

    Google Scholar 

  46. V. I. Kotov and V. V. Miller, Focusing and Isolation Relative to the Mass of High Energy Particles [in Russian], Atomizdat, Moscow, (1969).

    Google Scholar 

  47. F. Eraoto, K. Gamo, S. Namba, N. Samoto, and R. Shimizu, Jap. J. Appl. Phys., 24, No. 10, 809–811 (1985).

    ADS  Google Scholar 

  48. P. Riemenschneider, Q. Bui, A. Grohs, C. Jenzen, P. Landmeier, D. Morgan, D. Cumming, and M. Purvis, J. Vac. Sci. Technol., 4, No. 1, 68–72 (1986).

    Article  Google Scholar 

  49. M. Hassel Shearer, H. Takemura, M. Isobe, N. Goto, K. Tanaka, and S. Miyauchi, J. Vac. Sci. Technol., B4, No. 1, 64–67 (1986).

    Google Scholar 

  50. D. P. Kern, P. J. Coane, P. J. Houzego, and T. H. P. Chang, Solid State Technol., 127–131, Feb. (1984).

    Google Scholar 

  51. S. Hosaka, M. Ichihashi, H. Hayakawa, S. Nishi, and M. Migitaka, Jap. J. Appl. Phys., 21, No. 3, 543–549 (1982).

    Article  ADS  Google Scholar 

  52. K. Iwadate, R. Yamaguchi, K. Hirata, and K. Harada, 30th Intern. Symp. Electron, Ion, and Photon Beams, May 27–30, USA (1986).

    Google Scholar 

  53. E. de Chambost, B. Allanos, A. Frichet, J. Perrocheau, D. S. Alles, C. J. Biddick, J. H. Bruning, J. T. Clemens, et al., J. Vac. Sci. Technol., B4, No. 1, 73–77 (1986).

    Google Scholar 

  54. E. de Chambost, A. Frichet, M. Chartier, H. Ja The, and J. Trotel, J. Vac. Sci. Technol., B4, No. 1, 78–82 (1986).

    Google Scholar 

  55. M. Essig and H. C. Pfeiffer, J. Vac. Sci. Technol., B4, No. 1, 83–85 (1986).

    Google Scholar 

  56. I. Brodie, E. R. Westerberg, D. R. Cone, J. J. Muray, N. Williams, and L. Gasiorek, IEEE Trans. Elect. Dev., 28, No. 11, 422–428 (1981).

    Article  Google Scholar 

  57. B. J. G. M. Roelofs, J. B. Le Poole, J. E. Barth, and C. B. de Gruyter, Proc. Microcircuit Eng. Cong., Cambridge, UK, Academic Press, New York (1983), pp. 91–98.

    Google Scholar 

  58. B. J. G. M. Roelofs, and J. E. Barth, Microelectronic Engineering, 2, No. 4, 259–279 (1984).

    Article  Google Scholar 

  59. W. Kulke, Methods and Materials in Microelectronic Technology, J. Barton (editor), Plenun Press, New York-London (1984), pp. 127–144.

    Google Scholar 

  60. R. Ward, A. R. Franklin, P. A. Gould, and M. J. Plummer, J. Vac. Sci. Technol., 19, No. 4, 966 (1982).

    Article  Google Scholar 

  61. R. Ward, A. R. Franklin, I. H. Lewin, and P. A. Gould, and M. J. Plummer, J. Vac. Sci. Technol., B4, No. 1, 89–93 (1986).

    Google Scholar 

  62. W. R. Livesay and L. B. Anderson, J. Vac. Sci. Technol., B4, No. 1, 100–104 (1986).

    Google Scholar 

  63. K. A. Valiev, L. V. Velikov, R. Kh. Makhmutov, and A. V. Rakhov, Dokl. Akad. Nauk SSSR, 262, No. 6, 1377–1380 (1982).

    Google Scholar 

  64. K. A. Valiev, L. V. Velikov, S. D. Dushenkov, R. Kh. Makhmutov, A. V. Rakhov, and N. Yu. Ustinov, Mikroelektronika, 11, No. 5, 447–450 (1982).

    Google Scholar 

  65. H. Bohlen, J. Greschner, J. Keyser, W. Kulke, and P. Nehmiz, IBM J. Res. Develop., 26, No. 5, 568–579 (1982).

    Article  Google Scholar 

  66. G. N. Flerov and V. S. Barashenkov, Usp. Fiz. Nauk, 114, 351 (1974).

    Article  Google Scholar 

  67. K. A. Valiev, L. V. Velikov, R. Kh. Makhmutov, and A. M. Prokhorov, Pis’ma Zh. Tekh. Fiz., 11, No. 17, 1048–1053 (1985).

    Google Scholar 

  68. K. A. Valiev, L. V. Velikov, R. Kh. Makhmutov, and A. M. Prokhorov, Dokl. Akad. Nauk SSSR, 284, No. 3, 595–598 (1985).

    Google Scholar 

  69. P. Nehmiz, U. Behringer, H. Bohlen, and M. Kallmeyer, J. Vac. Sci. Technol., B1, 1023 (1983).

    Google Scholar 

  70. P. Nehmiz, W. Zapka, U. Behringer, M. Kallmeyer, and H. Bohlen, J. Vac. Sci. Technol., B3, No. 1, 136–139 (1985).

    Google Scholar 

  71. W. Zapka, P. Nehmiz, and H. Bohlen, J. Vac. Sci. Technol., B3, No. 1, 140–143 (1985).

    Google Scholar 

  72. U. Behringer and P. Wettiger, J. Vac. Sci. Technol., B4, No. 1, 94–99 (1986).

    Google Scholar 

  73. P. K. Hansma and J. Tersoff, J. Appl. Phys., 61, No. 2, R1–R23 (1987).

    Article  ADS  Google Scholar 

  74. J. Bardeen, Phys. Rev. Lett., 6, 57 (1961).

    Article  ADS  Google Scholar 

  75. G. Binnig, H. Rohrer, C. Gerber, and E. Weibel, Phys. Rev. Lett., 49, 57 (1982).

    Article  ADS  Google Scholar 

  76. G. Binnig and H. Rohrer, Surf. Sei, 126, 236 (1983).

    Article  ADS  Google Scholar 

  77. G. Binnig, H. Rohrer, C. Gerber, and E. Weibel, Phys. Rev. Lett., 50, 120 (1983).

    Article  ADS  Google Scholar 

  78. M. A. McCord and R. F. W. Pease, J. Vac. Sci. Technol., B4, No. 1, 86–88 (1986).

    Google Scholar 

  79. M. A. McCord and R. F. W. Pease, J. Vac. Sci. Technol., B3, No. 1, 198–201 (1985).

    Google Scholar 

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Authors and Affiliations

  1. Academy of Sciences of the USSR, Moscow, USSR

    Kamil A. Valiev

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  1. Kamil A. Valiev
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Valiev, K.A. (1992). Forming Electron Beams of Submicron Cross Section. In: The Physics of Submicron Lithography. Microdevices. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-3318-4_2

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  • DOI: https://doi.org/10.1007/978-1-4615-3318-4_2

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-6461-0

  • Online ISBN: 978-1-4615-3318-4

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