Abstract
Artificial intelligence (or AI) is a branch of computer science that has as one of its objectives the development of methodologies that will lead to programs “that exhibit the characteristics we associate with intelligence in human behavior—understanding language, learning, reasoning, solving problems, and so on” (Barr and Feigenbaum 1981). In this chapter, we focus on two areas of artificial intelligence that have shown great promise in microelectronic manufacturing diagnosis: expert systems and neural networks.
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References
References to Books and Papers on Expert Systems
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Griesmer, J.H., Kierstead, J.A., Rothman, M.J. (1993). Artificial Intelligence Techniques for Analysis: Expert Systems and Neural Networks. In: Landzberg, A.H. (eds) Microelectronics Manufacturing Diagnostics Handbook. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-2029-0_16
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