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Modeling for Manufacturing Diagnostics

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Microelectronics Manufacturing Diagnostics Handbook

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Abstract

An essential and important component in diagnosis is an analysis of the system. In this analysis, one attempts to relate the observed (desirable and undesirable) results to input parameters or conditions. This process is most efficient if a model of the system is used, together with well designed experiments. As it is used in many different contexts with different meanings, we define the term model to mean: an executable implementation of theoretical and empirical knowledge in this chapter. The appropriateness of the theory behind the model determines its usefulness in diagnosis. Good models are essential in proposing failure mechanisms, in design of good diagnostic experiments, and in interpreting the results of experiments. Based on this interpretation, one might reach a conclusion, appropriately modify the theory and iterate, or conduct more experiments to confirm results. On the other hand, without an appropriate theory, one is reduced to “educated” guesswork in these aspects of diagnostics.

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Authors and Affiliations

  1. IBM Research Division, Yorktown Heights, New York, USA

    Ajay Sharma

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  1. Ajay Sharma
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Abraham H. Landzberg

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© 1993 Springer Science+Business Media New York

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Sharma, A. (1993). Modeling for Manufacturing Diagnostics. In: Landzberg, A.H. (eds) Microelectronics Manufacturing Diagnostics Handbook. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-2029-0_15

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  • DOI: https://doi.org/10.1007/978-1-4615-2029-0_15

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-5840-4

  • Online ISBN: 978-1-4615-2029-0

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