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Measuring the Elastic Properties of Stressed Materials by Quantitative Acoustic Microscopy

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Advances in Acoustic Microscopy

Part of the book series: Advances in Acoustic Microscopy ((AAMI,volume 1))

Abstract

Quantitative acoustic microscopy has progressed rapidly since the first observation of oscillations in the acoustic material signature or V(z). The important role of Rayleigh waves was quickly established, and a further crucial step came with the development of line-focus-beam (LFB) lenses, since these allow directional excitation as well as more accurate analysis of the V(z) curve. For some purposes, it is enough to be able to extract the velocity and attenuation of the surface acoustic wave (SAW) from V(z) measurements, and then make qualitative observations about underlying material properties. For example lateral elastic inhomogeneity in piezoelectric wafers used for SAW devices can be detected with high sensitivity. It is often desirable to obtain more quantitative information about the underlying properties. The major challenge is that a change in the measured SAW velocity can result from changes in any number of parameters, such as the elastic constants, density, layer thickness, stress and strain.

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Authors and Affiliations

  1. Department of Materials, University of Oxford, Parks Road, Oxford, OX1 3PH, UK

    Z. Sklar, P. Mutti, N. C. Stoodley & G. A. D. Briggs

  2. Dipartimento di Ignegneria Nucleare, Politecnico di Milano, Milano, Italy

    P. Mutti

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  1. Z. Sklar
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  1. University of Oxford, Oxford, UK

    Andrew Briggs

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Sklar, Z., Mutti, P., Stoodley, N.C., Briggs, G.A.D. (1995). Measuring the Elastic Properties of Stressed Materials by Quantitative Acoustic Microscopy. In: Briggs, A. (eds) Advances in Acoustic Microscopy. Advances in Acoustic Microscopy, vol 1. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-1873-0_6

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  • DOI: https://doi.org/10.1007/978-1-4615-1873-0_6

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