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Measuring Thin-Film Elastic Constants by Line-Focus Acoustic Microscopy

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Advances in Acoustic Microscopy

Part of the book series: Advances in Acoustic Microscopy ((AAMI,volume 1))

Overview

Determining the elastic constants of anisotropic films deposited on anisotropic substrates from V(z) measurements obtained by using a line-focus acoustic micro­scope is discussed in Chapter 5. The procedure has three essential components: (1) measuring the V(z) curve as a function of direction of wave mode propagation in the thin-film/substrate system at fixed frequency and/or as a function of the frequency or film thickness for a fixed direction, (2) developing a theoreti­cal measurement model for parametric studies of V(z) curves, and (3) obtaining elastic constants by systematically comparing wave-mode velocities obtained from the theoretical model and V(z) measurements. Examples primarily concern transi­tion metal nitride films and superlattice films used as hard protective coatings for softer surfaces. Results are presented for several thin-film/substrate configu­rations. Advantages of the method as well as remaining problems that require further investigation are discussed.

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Authors and Affiliations

  1. Center for Quality Engineering and Failure Prevention, Northwestern University, Evanston, Illinois, 60208, USA

    Jan D. Achenbach, Jin O. Kim & Yung-Chun Lee

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  1. Jan D. Achenbach
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  2. Jin O. Kim
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  1. University of Oxford, Oxford, UK

    Andrew Briggs

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Achenbach, J.D., Kim, J.O., Lee, YC. (1995). Measuring Thin-Film Elastic Constants by Line-Focus Acoustic Microscopy. In: Briggs, A. (eds) Advances in Acoustic Microscopy. Advances in Acoustic Microscopy, vol 1. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-1873-0_5

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  • DOI: https://doi.org/10.1007/978-1-4615-1873-0_5

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