Abstract
X-ray microanalysis in the analytical electron microscope is invariably performed with a Si(Li) or an intrinsic Ge (IG) energy dispersive spectrometer. Apart from the earliest electron microscope micro-analyzer instruments in the 1960s, which used a crystal or wavelength dispersive spectrometer, all commercial AEMs offer EDS as the only x-ray detector. The reason for this is the limited confines of the stage of a TEM to which the x-ray detector is interfaced when creating an AEM. The narrow polepiece gap of any TEM makes it impossible to get a detector closer to the specimen than about a centimeter. Consequently, the collection angle of the detector is small (typically 0.05–0.15 sr) thus limiting the x-ray counting statistics. Although small, the EDS collection angle is still very much larger than could be provided by a WDS. Since the x-ray count rate in AEMs is very low in the first place, because of the small probe currents and thin specimens, only an EDS can provide statistically meaningful x-ray data.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
C. E. Lyman, D. E. Newbury, J. I. Goldstein, D. B. Williams, A. D. Romig Jr., J. T. Armstrong, P. E. Echlin, C. E. Fiori, D. C. Joy, E. Lifshin, and K-R. Peters, Scanning Electron Microscopy, X-Ray Microanalysis and Analytical Electron Microscopy: A Laboratory Workbook, Plenum Press, New York (1990).
D. B. Williams and E. B. Steel in: Analytical Electron Microscopy-1987 (D. C. Joy, ed.) San Francisco Press, San Francisco, p. 228 (1987).
S. M. Zemyan and D. B. Williams, in: Proceedings of the 27th Annual MAS Meeting (J. A. Small, ed.) San Francisco Press, San Francisco, p. 1236 (1992).
S. M. Zemyan and D. B. Williams, J. Microsc. 174, 1 (1994).
G. F. Knoll, Radiation Detection and Measurement, J. Wiley and Sons, New York, p. 92 (1979).
ANSI/IEEE Standard 759, Standard Test Procedure for Semiconductor X-Ray Energy Spectrometer, Institute of Electrical and Electronic Engineers, New York (1984).
G. Bertolini and G. Restelli, in: Atomic Inner-Shell Processes II: Experimental Approaches and Applications (B. Crasemann, ed.) Academic Press, New York, p. 140 (1975).
B. G. Lowe, Ultramicroscopy 28, 150 (1986).
J. R. Michael, in: X-Ray Spectrometry in Electron Beam Instruments (D. B. Williams, J. I. Goldstein, and D. E. Newbury, eds.) Plenum Press, New York, chap. 7 (1995).
W. A. P. Nicholson and A. J. Craven, J. Microsc. 168, 289 (1993).
C. E. Fiori, C. R. Swyt, and J. R. Ellis, Microbeam Analysis-1982 (K. F. J. Heinrich, ed.) San Francisco Press, San Francisco, p. 57 (1982).
R. G. Musket, Nucl. Instrum. Methods 117, 385 (1974).
R. B. Mott and J. J. Friel, in: X-Ray Spectrometry in Electron Beam Instruments (D. B. Williams, J. I. Goldstein, and D. E. Newbury, eds.) Plenum Press, New York, chap. 9 (1995).
D. Vaughan, ed. Energy-Dispersive X-ray Microanalysis: An Introduction, Kevex Corp., Foster City, CA, p. 25 (1983).
C. E. Lyman, J. I. Goldstein, D. B. Williams, D. W. Ackland, S. von Harrach, A. W. Nicholls, and P. J. Statham, Microbeam Anal. 2 S234 (1993).
C. E. Fiori and D. E. Newbury, in: Analytical Electron Microscopy-1981 (R. H. Geiss, ed.) San Francisco Press, San Francisco, p. 17 (1981).
J. I. Goldstein, D. E. Newbury, P. Echlin, D. C. Joy, C. E. Lyman, A. D. Romig, Jr.C. E. Fiori, and E. Lifshin, Scanning Electron Microscopy and X-ray Microanalysis, Second Ed., Plenum Press, New York (1992).
D. B. Williams, Practical Analytical Electron Microscopy in Materials Science, Philips Electron Optics, Mahwah, NJ, p. 57 (1984).
D. E. Newbury, in: X-Ray Spectrometry in Electron Beam Instruments (D. B. Williams, J. I. Goldstein, and D. E. Newbury, eds.) Plenum Press, New York, chap. 11 (1995).
C. E. Lyman and D. W. Ackland, in: Microbeam Analysis-1991 (D. G. Howitt, ed.) San Francisco Press, San Francisco, p. 461 (1991).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1995 Springer Science+Business Media New York
About this chapter
Cite this chapter
Zemyan, S.M., Williams, D.B. (1995). Characterizing an Energy Dispersive Spectrometer on an Analytical Electron Microscope. In: Williams, D.B., Goldstein, J.I., Newbury, D.E. (eds) X-Ray Spectrometry in Electron Beam Instruments. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-1825-9_12
Download citation
DOI: https://doi.org/10.1007/978-1-4615-1825-9_12
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4613-5738-4
Online ISBN: 978-1-4615-1825-9
eBook Packages: Springer Book Archive