Surface Characteristics of Integrated MEMS in High-Volume Production
In the early 1970’s, silicon pressure sensors were considered to be the leading edge of a micromachining technology that would revolutionize industrial instrumentation. This new technology did grow. However, commercialization was slower than anticipated — delays arose due to quality, cost, lack of standardization and difficulties related to electronic integration. Many of the quality problems were caused by surface instabilities.
KeywordsFurnace Phenyl Boiling Diphenyl Siloxane
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