Abstract
In the early 1970’s, silicon pressure sensors were considered to be the leading edge of a micromachining technology that would revolutionize industrial instrumentation. This new technology did grow. However, commercialization was slower than anticipated — delays arose due to quality, cost, lack of standardization and difficulties related to electronic integration. Many of the quality problems were caused by surface instabilities.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2003 Springer Science+Business Media New York
About this chapter
Cite this chapter
Martin, J. (2003). Surface Characteristics of Integrated MEMS in High-Volume Production. In: Hsu, S.M., Ying, Z.C. (eds) Nanotribology. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-1023-9_15
Download citation
DOI: https://doi.org/10.1007/978-1-4615-1023-9_15
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4613-5356-0
Online ISBN: 978-1-4615-1023-9
eBook Packages: Springer Book Archive