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Electron Interactions with c-C4F8

  • Loucas G. Christophorou
  • James K. Olthoff

Abstract

Besides its use in plasma etching, perfluorocyclobutane (c-C4F8) has potential applications as a gaseous dielectric, especially in gas mixtures (e. g., see Refs.1-3). Perfluorocyclobutane is also of environmental interest because it is a global warming gas.4 For these reasons, we have recently synthesized and assessed electron collision cross-section and electron transport-coefficient data for this gas.5 The results of this critical assessment are summarized and briefly discussed in this paper.

Keywords

Ionization Cross Section Electron Attachment Partial Cross Section Ionization Coefficient Total Ionization Cross Section 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2001

Authors and Affiliations

  • Loucas G. Christophorou
    • 1
  • James K. Olthoff
    • 1
  1. 1.Electricity Division, Electronics and Electrical Engineering LaboratoryNational Institute of Standards and TechnologyGaithersburgUSA

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