Benzene Destruction in Direct Current Atmospheric Pressure Air Glow Discharges
Chemical and semiconductor industries are using volatile organic compounds (VOCs) such as toluene, xylene, trichloro-ethylene (TCE), trichloroethane (TCA), benzene, and acetone as solvents and for substrate cleaning . However, the use of VOCs poses considerable health hazards. For example, inhalation of toluene with concentrations of 600 ppm for more than eight hours causes headache and dizziness . Benzene is carcinogenic at long term exposure .
KeywordsGlow Discharge Destruction Rate Benzene Concentration Cathode Fall Pressure Glow Discharge
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