Chapter 6 applies the models discussed in Chapter 4 to the case of the pulsed waveform. As was done in Chapter 5, the flux of charge from the plasma to the biased electrode is predicted and this predicted flux is used to obtain energy spectra of the ions. The aim of the chapter is to outline the factors that influence the flux of charge from the plasma to the electrode, discuss how this flux influences the temporal evolution of the electrode potential, and describe how the pulsed waveform can be applied to shape the energy spectra of the ions to the biased electrode. Through proper application of a pulsed waveform, the generation of energy spectra that become nearly mono-energetic can be achieved.
KeywordsEnergy Spectrum Volt Pulse Ionic Flux Electronic Flux Pulse Waveform
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