Abstract
Chemical analysis in the scanning electron microscope and electron microprobe is performed by measuring the energy and intensity distribution of the x-ray signal generated by a focused electron beam. The subject of x-ray production has already been introduced in Chapter 6, which describes the mechanisms for both characteristic and continuum x-ray production. This chapter is concerned with the methods for detecting and measuring these x-rays as well as converting them into a useful form for qualitative and quantitative analysis.
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Goldstein, J.I. et al. (2003). X-Ray Spectral Measurement: EDS and WDS. In: Scanning Electron Microscopy and X-ray Microanalysis. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-0215-9_7
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DOI: https://doi.org/10.1007/978-1-4615-0215-9_7
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4613-4969-3
Online ISBN: 978-1-4615-0215-9
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