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Specimen Preparation of Hard Materials: Metals, Ceramics, Rocks, Minerals, Microelectronic and Packaged Devices, Particles, and Fibers

  • Joseph I. Goldstein
  • Dale E. Newbury
  • Patrick Echlin
  • David C. Joy
  • Charles E. Lyman
  • Eric Lifshin
  • Linda Sawyer
  • Joseph R. Michael

Abstract

This chapter outlines a variety of sample preparation procedures for imaging and x-ray analysis of hard materials in the SEM. Several special and relatively new techniques, such as the use of focused ion beams for preparation of cross sections of various materials, are also discussed.

Keywords

Specimen Preparation Geological Sample EBSD Pattern Plasma Cleaning Microchemical Analysis 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2003

Authors and Affiliations

  • Joseph I. Goldstein
    • 1
  • Dale E. Newbury
    • 2
  • Patrick Echlin
    • 3
  • David C. Joy
    • 4
  • Charles E. Lyman
    • 5
  • Eric Lifshin
    • 6
  • Linda Sawyer
    • 7
  • Joseph R. Michael
    • 8
  1. 1.University of MassachusettsAmherstUSA
  2. 2.National Institute of Standards and TechnologyGaithersburgUSA
  3. 3.Cambridge Analytical Microscopy Ltd.CambridgeEngland
  4. 4.University of TennesseeKnoxvilleUSA
  5. 5.Lehigh University BethlehemBethlehemUSA
  6. 6.State University at AlbanyAlbanyUSA
  7. 7.Ticona LLCSummitUSA
  8. 8.Sandia National LaboratoriesAlbuquerqueUSA

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