Abstract
This chapter outlines a variety of sample preparation procedures for imaging and x-ray analysis of hard materials in the SEM. Several special and relatively new techniques, such as the use of focused ion beams for preparation of cross sections of various materials, are also discussed.
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Goldstein, J.I. et al. (2003). Specimen Preparation of Hard Materials: Metals, Ceramics, Rocks, Minerals, Microelectronic and Packaged Devices, Particles, and Fibers. In: Scanning Electron Microscopy and X-ray Microanalysis. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-0215-9_11
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DOI: https://doi.org/10.1007/978-1-4615-0215-9_11
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4613-4969-3
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