Gas Phase Kinetics

  • Francis F. Chen
  • Jane P. Chang

Abstract

The unique chemical reactions that take place in a plasma are almost entirely caused by inelastic collisions between energetic electrons and neutrals of thermal energy. The inelastic scattering produces a host of excited states, which then relax and/or interact by collision between particles or by collisions with the walls of the reactor.

Keywords

Recombination Chlorine 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

Copyright information

© Springer Science+Business Media New York 2003

Authors and Affiliations

  • Francis F. Chen
    • 1
  • Jane P. Chang
    • 2
  1. 1.Electrical Engineering DepartmentUniversity of CaliforniaLos AngelesUSA
  2. 2.Chemical Engineering DepartmentUniversity of CaliforniaLos AngelesUSA

Personalised recommendations