Abstract
A major concern in both scanning electron and scanning ion microscopy is that of sample charging, but strategies to eliminate this problem are available.
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© 2013 David Joy
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Joy, D.C. (2013). Charging and Damage . In: Helium Ion Microscopy. SpringerBriefs in Materials. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-8660-2_5
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DOI: https://doi.org/10.1007/978-1-4614-8660-2_5
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Publisher Name: Springer, New York, NY
Print ISBN: 978-1-4614-8659-6
Online ISBN: 978-1-4614-8660-2
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