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Charging and Damage

Chapter
Part of the SpringerBriefs in Materials book series (BRIEFSMATERIALS)

Abstract

A major concern in both scanning electron and scanning ion microscopy is that of sample charging, but strategies to eliminate this problem are available.

Keywords

Stable Imaging Sample Charge Dwell Period Large Electric Field Specimen Chamber 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Copyright information

© David Joy 2013

Authors and Affiliations

  1. 1.University of TennesseeKnoxvilleUSA

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