Abstract
Chemical vapor deposition hydrogen reduction of methyltrichlorosilane (MTS) is most prominent method for production of silicon carbide (SiC) nanowires with controlled morphology. In a typical SiC nanowire synthesis process the cracking of MTS is carried out in reducing atmosphere of hydrogen using chemical vapor deposition technique at high temperature and normal atmospheric pressure. Taguchi method is very useful to design experiments specially in the cases where large numbers of variables are to be considered. This statistical method has been used to design the experiments to get the optimum parameters for bulk production of silicon carbide wires of uniform diameter in nanometer range. Further the effect of different parameters on the morphology of SiC deposit has been discussed. XRD and SEM analysis showed the growth of crystalline \(\upbeta \)-SiC wires having different morphology. From the analysis of variance (ANOVA) of data it has been observed that growth temperature and hydrogen to MTS ratio in carrier gas are the two important parameters which decide the final growth morphology of SiC deposition. At higher temperature (\(\ge \)1400 \(^{\circ }\)C), the SiC nuclei prefer to grow as SiC grains rather than wires. The optimum deposition conditions have been obtained by analyzing Signal to Noise (S/N) ratio corresponding to lowest deposition rate and minimum growth diameter of SiC wires. The optimum deposition conditions have been used for uniform diameter growth of SiC nanowires, smoothness of the surface, and homogeneous growth of SiC on the surface. It has been observed that the hydrogen to MTS flow rate ratio value should be above 20 for the growth of SiC wires of nanometer diameter. The deposition temperature for the growth of crystalline SiC wires should be 1100–1300 \(^{\circ }\)C. The total flow rate of carrier gas comprising of argon and hydrogen should be in moderate range for particular hydrogen to MTS ratio. The effect of H\(_{2}\)/MTS mole ratio on morphology of SiC deposition by varying H\(_{2}\)/MTS mole ratio from 0 to \(\sim \)80 has been discussed in detail. This detail process study has given a new perspective to produce SiC nanowires of high purity and homogeneous diameter by a simple atmospheric pressure CVD method without using a metallic catalyst. Even manipulation of growth parameters can be done to get desired morphology of SiC deposit.
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References
Wang, Z.L., et al.: Characterizing the structure and properties of individual wire-like nanoentities. Adv. Mater. 12, 1295 (2000)
Hu, J., et al.: Chemistry and physics in one dimension: synthesis and properties of nanowires and nanotubes. Acc. Chem. Res. 32, 435 (1999)
Levenson, M.D., et al.: Welcome to the duv revolution. Solid State Technol. 38(9), 81–98 (1995)
Gibson, J.M., et al.: Reading and writing with electron beams. Phys. Today 50, 56 (1997)
Hong, S.H., et al.: Multiple ink nanolithography: toward a multiple-pen nano-plotter. Science 286, 523 (1999)
Xia, Y., et al.: Unconventional methods for fabricating and patterning nanostructures. Chem. Rev. 99, 1823 (1999)
Yang, P., et al.: Inorganic semiconductor nanowires. Int. J. Nanosci. 1, 1–39 (2002)
Xia, Y., et al.: One-dimensional nanostructures: synthesis, characterization, and applications. Adv Mater. 15, 353–389 (2003)
Givargizov E.I., et al.: Highly anisotropic crystals. In: Senechal M., College S. (eds.) Reidel, Dordrecht (1987)
Noll, W., et al.: Synthesis in system \({\rm{MgO}}/{\rm{SiO}}_{2}/{\rm{H}}_{2}{\rm{O}}\). Z. Anorg. Chem. 261, 1 (1950)
Cheetham, A.K., et al.: Solid State Chemistry (Compounds), p. 31. Clarendon Press, Oxford (1992)
Cheetham, A.K., et al.: Chemistry and Physics of One-Dimensional Metals. In: Keller, H.J. (ed.) Plenum Press, New York (1977)
Huiyu, C., et al.: Selenium nanowires and nanotubes synthesized via a facile template-free solution method. Mater. Res. Bull 45, 699–704 (2010)
Gates, B., et al.: Synthesis and characterization of uniform nanowires of trigonal selenium. Adv. Funct. Mater. 12, 219–227 (2002)
Mayers, B., et al.: One-dimensional nanostructures of trigonal tellurium with various morphologies can be synthesized using a solution-phase approach. J. Mater. Chem. 12, 1875–1881 (2002)
Messer, B., et al.: Surfactant-induced mesoscopic assemblies of inorganic molecular chains. Adv. Mater. 12, 1526–1528 (2000)
Song, J., et al.: MMo3Se3 (M = Li+, Na+, Rb+, Cs+, NMe4+) nanowire formation via cation exchange in organic solution. J. Am. Chem. Soc. 123, 9714–9715 (2001)
Meyer, K.H., et al.: Propriété des polymères on solution VI. Energie libre et chaleur de solution. Système nitrocellulose-cyclo-hexanone. Helv. Chim. Acta. 61, 783–790 (1937)
Stryer, L., et al.: Biochemistry, 3rd edn. W.H. Freeman and Company, New York (1988)
Jones, E.T.T., et al.: Preparation and characterization of molecule-based transistors with a 50-nanometer source-drain separation with use of shadow deposition techniques. Toward faster, more sensitive molecule-based devices. J. Am. Chem. Soc. 109, 5526 (1987)
Jorritsma, J., et al.: General technique for fabricating large arrays of nanowires. Nanotechnology 7, 263 (1996)
Penner, R.M., et al.: Mesoscopic metal particles and wires by electrodeposition. J. Phys. Chem. B 106, 3339 (2002)
Gao, T., et al.: Template synthesis of Y-junction metal nanowires. Appl. Phys. A 74, 403 (2002)
Masuda, H., et al.: Ordered metal nanohole arrays made by a two-step replication of honeycomb structures of anodic alumina. Science 268, 1466 (1995)
Brumlik, C.J., et al.: Template synthesis of metal microtubule ensembles utilizing chemical, electrochemical, and vacuum deposition techniques. J. Mater. Res. 9, 1174 (1994)
Cao, H., et al.: Sol–gel template synthesis of an array of single crystal CdS nanowires on a porous alumina template. Adv. Mater. 13, 1393 (2001)
Hoyer, P., et al.: Formation of a titanium dioxide nanotube array. Langmuir 12, 1411 (1996)
Li, Y., et al.: Ordered semiconductor ZnO nanowire arrays and their photoluminescence properties. Appl. Phys. Lett. 76, 2011 (2000)
Kwan, S., et al.: Synthesis and assembly of \({\rm {BaWO}}_{4}\) nanorods. Chem. Commun. 5, 447 (2001)
Yu, Y.-Y., et al.: Gold nanorods: electrochemical synthesis and optical properties. J. Phys. Chem. B 101, 6661 (1997)
Yin, Y., et al.: Silver nanowires can be directly coated with amorphous silica to generate well-controlled coaxial nanocables of silver/silica. Nano Lett. 2, 427 (2002)
He, R.R., et al.: Functional bimorph composite nanotapes. Nano Lett. 2, 1109 (2002)
Zhang, Y., et al.: Metal coating on suspended carbon nanotubes and its implication to metal-tube interaction. Chem. Phys. Lett. 331, 35 (2000)
Trentler, T.J., et al.: Solution–liquid–solid growth of crystalline III–V semiconductors: an analogy to vapor–liquid–solid growth. Science 270, 1791–1794 (1995)
Trentler, J.J., et al.: Solution-liquid-solid growth of indium phosphide fibers from organometallic precursors: elucidation of molecular and nonmolecular components of the pathway. J. Am. Chem. Soc. 119, 2172–2182 (1997)
Markowitz, P.D., et al.: Phase separation in \({\rm{Al}}_{x}{\rm{Ga}}_{1-x}{\rm{As}}\) nanowhiskers grown by the solution-liquid-solid mechanism. J. Am. Chem. Soc. 123, 4502–4511 (2001)
Lourie, O.R., et al.: CVD growth of boron nitride nanotubes. Chem. Mater. 12, 1808–1810 (2000)
Yao, J., et al.: Solvothermal synthesis and characterization of CdS nanowires/PVA composite films. Mater. Lett. 59, 3652–3655 (2005)
Cheng, H.M., et al.: Formation of branched ZnO nanowires from solvothermal method and dye-sensitized solar cells applications. J. Phys. Chem. C. 112(42), 16359–16364 (2008)
Peng, X.G., et al.: Shape control of CdSe nanocrystals. Nature 404, 59 (2000)
Manna, L., et al.: Synthesis of soluble and processable rod-, arrow-, teardrop-, and tetrapod-shaped CdSe nanocrystals. J. Am. Chem. Soc. 122, 12700 (2000)
Sun, Y., et al.: Crystalline silver nanowires by soft solution processing. Nano Lett. 2, 165 (2002)
Korgel, B.A., et al.: Self-assembly of silver nanocrystals into two-dimensional nanowire arrays. Adv. Mater. 10, 661 (1998)
Wyrwa, D., et al.: One-dimensional arrangements of metal nanoclusters. Nano Lett. 2, 419 (2002)
Taylor, G.F.: A method of drawing metallic filaments and a discussion of their properties and uses. Phys. Rev. 23, 655 (1924)
Penner, R.M., et al.: Fabrication and use of nanometer-sized electrodes in electrochemistry. Science 250, 1118 (1990)
Levitt, A.P.: Whisker Technology, Wiley-Interscience, New York (1970)
Volmer, M., et al.: The mechanism of molecular condensation on crystals. Z. Phys. 7, 13 (1921)
Sears, G.W., et al.: A mechanism of whisker growth. Acta Metall. 3, 367 (1955)
Zhang, Y.: A simple method to synthesize nanowires. Chem. Mater. 14, 3564 (2002)
Dai, Z.R., et al.: Tin oxide nanowires, nanoribbons, and nanotubes. J. Phys. Chem. B 106, 1274 (2002)
Hayashi, S., et al.: Growth of magnesia whiskers by vapor-phase reactions. J. Cryst. Growth 24/25, 345 (1974)
Wolfe, E.G., et al.: Growth and morphology of magnesium oxide whiskers. J. Am. Ceram. Soc. 48, 279 (1965)
Duan, X.F., et al.: Laser-assisted catalytic growth of single crystal GaN nanowires. J. Am. Chem. Soc. 122, 188 (2000)
Zhang, Y.J., et al.: Synthesis of thin Si whiskers (nanowires) using \({\rm {SiCl}}_{4}\). J. Cryst. Growth 226, 185 (2001)
Chen, C.C., et al.: Catalytic growth and characterization of gallium nitride nanowires. J. Am. Chem. Soc. 123, 2791 (2001)
Wang, Y.W., et al.: Catalytic growth and photoluminescence properties of semiconductor single-crystal ZnS nanowires. Chem. Phys. Lett. 357, 314 (2002)
Huang, M.H., et al.: Catalytic growth of Zinc oxide nanowires by vapor transport. Adv. Mater. 13, 113 (2000)
Iijima, S.: Helical microtubules of graphitic carbon. Nature (London) 354, 56 (1991)
Chopra, N.G., et al.: Boron nitride nanotubes. Science 269, 966 (1995)
Tenne, R., et al.: Polyhedral and cylindrical structures of tungsten disulphide. Nature (London) 360, 444 (1992)
Feldman, Y., et al.: High-rate, gas-phase growth of \({\rm {MoS}}_{2}\) nested inorganic fullerenes and nanotubes. Science 267, 222 (1995)
Weng-Sieh, Z., et al.: Synthesis of BxCyNz nanotubules. Phys. Rev. B 51(11), 229 (1995)
Han, W.Q., et al.: Continuous synthesis and characterization of silicon carbide nanorods. Chem. Phys. Lett. 265, 374 (1997)
Yang, P.D., et al.: Nanorod-superconductor composites: a pathway to materials with high critical current densities. Science 273, 1836 (1996)
Xu, X.L., et al.: Tem characterization of calcium-oxygen nanorods. Nanostruct. Mater. 8(3), 373 (1997)
Han, W.Q., et al.: Synthesis of gallium nitride nanorods through a carbon nanotube-confined reaction. Science 277, 1287 (1997)
Han, W.Q., et al.: Synthesis of silicon nitride nanorods using carbon nanotube as a template. Appl. Phys. Lett. 71(16), 2271 (1997)
Ono, T., et al.: Si nanowire growth with ultrahigh vacuum scanning tunneling microscopy. Appl. Phys. Lett. 70(14), 1852 (1997)
Wong, E.W., et al.: Nanobeam mechanics: elasticity, strength, and toughness of nanorods and nanotubes. Science 277, 1971 (1997)
Chu, Yanhui, et al.: Influence of SiC nanowires on the properties of SiC coating for C/C composites between room temperature and 1500\(\circ \)C. Corros. Sci. 53, 3048–3053 (2011)
Menga, Shuai: et al.: Tailoring and application of SiC nanowires in composites. Materials Science and Engineering A 527, 5761–5765 (2010)
Chena, Jianjun, et al.: Field emission performance of SiC nanowires directly grown on graphite substrate. Mater. Chem. Phys. 126, 655–659 (2011)
Karuppanan, S., et al.: Enhanced field emission from density-controlled SiC nanowires. Mater. Chem. Phys. 112, 88–93 (2008)
Li, Ke-Zhi, et al.: Photoluminescence of hexagonal-shaped SiC nanowires prepared by sol–gel process. Mater. Sci. Eng. A 460–461, 233–237 (2007)
Hao, J.Y., et al.: Photocatalytic hydrogen production over modified SiC nanowires under visible light irradiation. Inter. J. Hydrogen Ener 37, 15038–15044 (2012)
Wanga, H.Y.: Capacitive humidity sensing properties of SiC nanowires grown on silicon nanoporous pillar array. Sens Actuators, B 166—-167, 451–456 (2012)
Liu, H.: Porous SiC nanowire arrays as stable photocatalyst for water splitting under UV irradiation. Mater. Res. Bull. 47, 917–920 (2012)
Chu, Y.: SiC coating toughened by SiC nanowires to protect C/C composites against oxidation. Ceram. Inter. 38, 189–194 (2012)
Choi, H.-J.: Continuous synthesis of silicon carbide whiskers. J. Mater. Sci. 30, 1982 (1995)
Meng, G.W., et al.: Preparation of \(\upbeta \)-SiC nanorods with and without amorphous \({\rm {SiO}}_{2}\) wrapping layers. J. Mater. Res. 13, 2533 (1998)
Yang, W.Y., et al.: Synthesis of silicon carbide nanorods by catalyst-assisted pyrolysis of polymeric precursor. Chem. Phys. Lett. 383, 441 (2004)
Shen, G., et al.: Silicon carbide hollow anospheres, nanowiresand coaxial nanowires. Chem. Phys. Lett. 375, 177–184 (2003)
Chiu, S.C., et al.: SiC nanowires in large quantities: synthesis, band gap characterization, and photoluminescence properties. J. Cryst. Growth 311, 1036 (2009)
Zhu, J., et al.: Nanostructure of GaN and SiC nanowires based on carbon nanotubes. J. Mater. Res. 14, 1175 (1999)
Park, B.T., et al.: Growth and characterization of silicon carbide nanowires. Surf. Rev. Lett. 11, 373 (2004)
Ryu, Y., et al.: Direct growth of core-shell SiC–\({\rm {SiO}}_{2}\) nanowires and field emission characteristics. Nanotechnology 16, S370 (2005)
Liu, D.F., et al.: A simple large-scale synthesis of coaxial nanocables:silicon carbide sheathed with silicon oxide. Chem. Phys. Lett. 375, 269–272 (2003)
Choi, H.-J., et al.: Growth and modulation of silicon carbide nanowires. J. Cryst. Growth 269, 472 (2004)
Zhou, X.T., et al.: Thin \(\upbeta \)-SiC nanorods and their field emission properties. Chem. Phys. Lett. 318, 58 (2000)
Kim, W.J., et al.: Growth of SiC nanowires within stacked SiC fiber fabrics by a noncatalytic chemical vapor infiltration technique. J. Cryst. Growth 300, 503–508 (2007)
Yang, W., et al.: In situ growth of SiC nanowires on RS-SiC substrate(s). J. Cryst. Growth 264, 278–283 (2004)
Takao, S., et al.: MOCVD growth of spherical aggregates of SiC nanocrystallites. Appl. Surf. Sci. 254, 7630–7632 (2008)
Attolini, G., et al.: A new growth method for the synthesis of 3C-SiC nanowires. Mater. Lett. 63, 2581–2583 (2009)
Ju, Z., et al.: High-yield synthesis of single-crystalline 3C-SiC nanowires by a facile autoclave route. Mater. Lett. 61, 3913–3915 (2007)
Lespiaux, D., et al.: Chemisorption on \(\upbeta \)-SiC and amorphous \({\rm {SiO}}_{2}\) during CVD of silicon carbide from the Si–C–H–Cl system. Correlations with the nucleation process. Thin Solid Films 265, 40–51 (1995)
Fu, Q.G., et al.: Synthesis of silicon carbide nanowires by CVD without using a metallic catalyst. Mater. Chem. Phys. 100, 108–111 (2006)
Wang, F.L., et al.: SiC nanowires synthesized by rapidly heating a mixture of SiO and arc-discharge plasma pretreated carbon black. Nanoscale Res. Lett. 4, 153 (2009)
Chen, J., et al.: A simple catalyst-free route for large-scale synthesis of SiC nanowires. J. Alloys and Compd. 509, 6844–6847 (2011)
Longkullabutra, H., et al.: Large-scale: synthesis, microstructure, and FT-IR property of SiC nanowires. Curr. Appl. Phys. 12, S112–S115 (2012)
Zhou, W.M., et al.: Large-scale synthesis and characterization of SiC nanowires by high-frequency induction heating. Appl. Surf. Sci. 252, 5143–5148 (2006)
Wei, J., et al.: Large-scale synthesis and photoluminescence properties of hexagonal-shaped SiC nanowires. J. Alloys Compd. 462, 271–274 (2008)
Sharma, P., et al.: Process parameter selection for strontium ferrite sintered magnets using Taguchi L9 orthogonal design. J. Mate. Process. Technol. 168, 147–151 (2005)
Khoeia, A.R., et al.: Design optimisation of aluminium recycling processes using Taguchi technique. J. Mater. Process. Technol. 27, 96–106 (2002)
Prakash, J., et al.: Taguchi method optimization of parameters for growth of nano dimensional SiC wires by chemical vapor deposition technique. Curr. Nanosci. 8, 161–169 (2012)
Lee, D.N.: A model for development of orientation of vapour deposits. J. Mater. Sci. 24, 4375–4378 (1989)
Alwndrof, M.D., et al.: A model of silicon carbide chemical vapor deposition. J. Electrochem. Soc. 138(3), 841–852 (1991)
Sotirchos, S.V., et al.: On the homogeneous chemistry of the thermal decompositionof methyltrichlorosilane: thermodynamic analysis and kinetic modeling. J. Electrochem. Soc. 141, 1599–1627 (1994)
Joseik, A., et al.: Residence-time dependent kinetics of CVD growth of SiC in the MTSH2 system. J. Cryst. Growth 160, 253–260 (1996)
Yang, W., et al.: Fabrication in-situ SiC nanowires/SiC matrix composite by chemical vapour infiltration process. Mater. Lett. 58, 3145–3148 (2004)
Wei, J., et al.: Fabrication of composite structure of carbon fibers and high density SiC nanowires. Physica E 41, 1810–1813 (2009)
Sun, X.H., et al.: Formation of silicon carbide nanotubes and nanowires via reaction of silicon (from disproportionation of silicon monoxide) with carbon nanotubes. J. Am. Chem. Soc. 124, 14464–14471 (2002)
Chen, J., et al.: Growth mechanism of twinned SiC nanowires synthesized by a simple thermal evaporation method. Physica E 42, 2335–2340 (2010)
Chiew, Y.L., et al.: Growth of SiC nanowires using oil palm empty fruit bunch fibres infiltrated with tetraethyl orthosilicate. Physica E 44, 2041–2049 (2012)
Jian, W., et al.: Growth and morphology of one-dimensional SiC nanostructures without catalyst assistant. Mater. Chem. Phys. 95, 140–144 (2006)
Zhaoqian, L., et al.: Growth mechanism of silica nanowires without a metal catalyst via oxyacetylene torch ablation. Mater. Lett. 74, 118–120 (2012)
Dhiman, R., et al.: Growth of SiC nanowhiskers from wooden precursors, separation, and characterization. Ceram. Inter. 37, 3759–3764 (2011)
Lee, J.S., et al.: Improvement of porous silicon carbide filters by growth of silicon carbide nanowires using a modified carbothermal reduction process. J. Alloys Compd 467, 543–549 (2009)
Lee, J.S., et al.: In situ growth of SiC nanowires by carbothermal reduction using a mixture of low-purity \({\rm {SiO}}_{2}\) and carbon. J. Alloys Compd 456, 257–263 (2008)
Huang, H., et al.: In situ growth of silicon carbide nanowires from anthracite surfaces. Ceram. Inter. 37, 1063–1072 (2011)
Chu, Y., et al.: Microstructure and growth mechanism of SiC nanowires with periodically fluctuating hexagonal prisms by CVD. J. Alloys Compd 508, L36–L39 (2010)
Xin, L., et al.: Morphological evolution of one-dimensional SiC nanomaterials controlled by sol–gel carbothermal reduction. Mater. Charact. 65, 55–61 (2012)
Wei, J., et al.: Photoluminescence performance of SiC nanowires, whiskers and agglomerated nanoparticles synthesized from activated carbon. Physica E 41, 1616–1620 (2009)
Taguchi, T., et al.: Preparation and characterization of single-phase SiC nanotubes and C–SiC coaxial nanotubes. Physica E 28, 431–438 (2005)
Guo, J.Z., et al.: Preparation of SiC nanowires with fins by chemical vapor deposition. Physica E 39, 262–266 (2007)
Li, X., et al.: Preparation of silicon carbide nanowires via a rapid heating process. Mater. Sci. Eng B 176, 87–91 (2011)
Li, G., et al.: SiC nanowires grown on activated carbon in a polymer pyrolysis route. Mater. Sci. Eng. B 166, 108–112 (2010)
Zhao, H., et al.: Silicon carbide nanowires synthesized with phenolic resin and silicon powders. Physica E 41, 753–756 (2009)
Khongwong, W., et al.: Simple approach to fabricate SiC–\({\rm {SiO}}_{2}\) composite nanowires and their oxidation resistance. Mater. Sci. Eng. B 173, 117–121 (2010)
Li, B., et al.: Simultaneous growth of SiC nanowires, SiC nanotubes, and SiC/\({\rm {SiO}}_{2}\) core–shell nanocables. J. Alloys Compd. 462, 446–451 (2008)
Kang, P., et al.: Synthesis of \({\rm {SiO}}_{2}\) covered SiC nanowires with milled Si,C nanopowders. Mater. Lett. 65, 3461–3464 (2011)
Zhang, L.D., et al.: Synthesis and characterization of nanowires and nanocables. Mater. Sci. Eng. A286, 34–38 (2000)
Chen, J., et al.: Synthesis and photoluminescence of needle-shaped 3C-SiC nanowires on the substrate of PAN carbon fiber. J. Alloys Compd 456, 320–323 (2008)
Zhang, E., et al.: Synthesis and photoluminescence property of silicon carbon nanowires synthesized by the thermal evaporation method. Physica E 41, 655–659 (2009)
Wei, J., et al.: Synthesis of centimeter-scale ultra-long SiC nanowires by simple catalyst-free chemical vapor deposition. J. Cryst. Growth 335, 160–164 (2011)
Niu, J.J., et al.: Synthesis of macroscopic SiC nanowires at the gram level and their electrochemical activity with Pt loadings. Acta Mater. 57, 3084–3090 (2009)
Zhang, H.X., et al.: Synthesis of nanostructured SiC using the pulsed laser deposition technique. Materi. Res. Bull. 44, 184–188 (2009)
Raman, V., et al.: Synthesis of silicon carbide nanofibers from pitch blended with sol–gel derived silica. Mater. Lett. 60, 3906–3911 (2006)
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Prakash, J., Ghosh, S.K., Sathiyamoorthy, D. (2013). Catalyst-Free Chemical Vapor Deposition for Synthesis of SiC Nanowires with Controlled Morphology. In: Li, H., Wu, J., Wang, Z. (eds) Silicon-based Nanomaterials. Springer Series in Materials Science, vol 187. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-8169-0_9
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