Skip to main content
SpringerLink
Log in

Silicon Nanoparticles-Based Light Emitting Capacitors

  • Chapter
  • First Online:
Silicon-based Nanomaterials

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 187))

  • 2153 Accesses

Abstract

This chapter is focused on the study of the microstructural, optical, electrical, and electro-optical properties of Si-nanoparticles (Si-nps) embedded in a silica matrix for light emitting devices applications. Si-nps were created from silicon-rich oxide [SRO, (\(\mathrm{{SiO}}_\mathrm{x}\), \(\mathrm{x}<2\))] films which are deposited by low pressure chemical vapor deposition and followed by a thermal annealing at high temperature. The composition, microstructure, and optical properties of SRO films are analyzed as a function of the silicon excess and thermal annealing temperature. Once the properties of these materials are known, SRO films which exhibited the best photoluminescent (strongest PL) properties were chosen in order to analyze their electrical and electroluminescent (EL) properties. Simple Metal–Oxide–Semiconductor structures using the SRO films as the dielectric layer were fabricated for these studies. Blue and red EL was observed by changing the Si-np size from 1.5 to 2.7 nm embedded in the silica matrix, respectively. EL is ascribed to the charge injection into the Si-nps embedded in the SRO films through a balanced transport network. The EL emission is observed with the naked eye and in daylight conditions on the whole area of devices. Therefore, these results prove the feasibility to obtain LECs by using simple capacitors with SRO films as the active layer.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 129.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 169.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. Canham, L.T.: Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers. Appl. Phys. Lett. 57, 1046–1048 (1990)

    Article  CAS  Google Scholar 

  2. Chang, I.M., Pan, S.C., Chen, Y.F.: Light-induced degradation on porous silicon. Phys. Rev. B 48, 8747–8750 (1993)

    Article  CAS  Google Scholar 

  3. Kapetanakis, E., Normand, P., Tsoukalas, D., Beltsios, K., Stoemenos, J., Zhang, S., Van den Berg, J.: Charge storage and interface states effects in Si-nanocrystal memory obtained using low-energy Si\(^{+}\) implantation and annealing. Appl. Phys. Lett. 77(21), 3450–3452 (2000)

    Article  CAS  Google Scholar 

  4. Jambois, O., Rinnert, H., Devaux, X., Vergnat, M.: Photoluminescence and electroluminescence of size-controlled silicon nanocrystallites embedded in SiO2 thin films. J. Appl. Phys. 98, 046105 (2005)

    Article  Google Scholar 

  5. Gong-Ru, L., Chun-Jung, L.: Improved blue-green electroluminescence of metal-oxide-semiconductor diode fabricated on multirecipe Si-implanted and annealed SiO2/Si substrate. J. Appl. Phys. 95(12), 8484–8486 (2004)

    Article  Google Scholar 

  6. Aceves, M., Carrillo, J., Carranza, J., Calleja, W., Falcony, C., Rosales, P.: Duality metal oxide semiconductor-PN junction in the Al/silicon rich oxide/Si structure as a radiation sensor. Thin Solid Films 373, 134–136 (2000)

    Article  CAS  Google Scholar 

  7. DiMaria, D.J., Kirtley, J.R., Pakulis, E.J., Dong, D.W., Kuan, T.S., Pesavento, F.L., Theis, T.N., Cutro, J.A., Brorson, S.D.: Electroluminescence studies in silicon dioxide films containing tiny silicon islands. J. Appl. Phys. 56(2), 401–416 (1984)

    Article  CAS  Google Scholar 

  8. Aceves, M., Falcony, C., Reynoso, A., Calleja, W., Torres, A.: The conduction properties of the silicon/off-stoichiometry-SiO\(_{2}\) diode. Solid-State Electronics 39, 637–644 (1996)

    Article  CAS  Google Scholar 

  9. Morales, A., Domínguez, C., Barreto, J., Riera, M., Aceves, M., Luna, J.A., Yu, Z., Kiebach, R.: Spectroscopical analysis of luminescent silicon rich oxide films. Rev. Mex. Fís. 53, 279–282 (2007)

    Google Scholar 

  10. Lin, ChJ: Lin, G.R.: Defect-enhanced visible electroluminescence of multi-energy silicon-implanted silicon dioxide film. IEEE J. Quantum Electron. 41, 441–447 (2005)

    Article  CAS  Google Scholar 

  11. Song, H.Z., Bao, X.M., Li, N.S., Zhang, J.Y.: Relation between electroluminescence and photoluminescence of Si\(^{+}\)-implanted SiO\(_{2}\). J. Appl. Phys. 82, 4028–4032 (1997)

    Article  CAS  Google Scholar 

  12. Lin, G.R., Lin, ChJ, Lin, ChK, Chou, L.J., Chueh, Y.L.: Oxygen defect and Si nanocrystal dependent white-light and near-infrared electroluminescence of Si-implanted and plasma-enhanced chemical-vapor deposition-grown Si-rich SiO\(_{2}\). J. Appl. Phys. 97, 094306 (2005)

    Article  Google Scholar 

  13. Lin, G.R.: Lin, Ch.J: Improved blue-green electroluminescence of metal-oxide-semiconductor diode fabricated on multirecipe Si-implanted and annealed SiO\(_{2}\)/Si substrate. J. Appl. Phys. 95, 8484–8486 (2004)

    Article  CAS  Google Scholar 

  14. Walters, R.J., Carreras, J., Feng, T., Bell, L.D., Atwater, H.A.: Silicon Nanocrystal Field-Effect Light-Emitting Devices. IEEE J. Sel. Top. Quantum Electron. 12, 1647–1656 (2006)

    Article  CAS  Google Scholar 

  15. Linnros, J., Lalic, N., Knápek, P., Luterová, K., Kocka, J., Fejfar, A., Pelant, I.: Instabilities in electroluminescent porous silicon diodes. Appl. Phys. Lett. 69, 833–835 (1996)

    Article  CAS  Google Scholar 

  16. Irrera, A., Iacona, F., Crupi, I., Presti, C.D., Franzò, G., Bongiorno, C., Sanfilippo, D., Di Stefano, G., Piana, A., Fallica, P.G., Canino, A., Priolo, F.: Electroluminescence and transport properties in amorphous silicon nanostructures. Nanotechnology 17, 1428–1436 (2006)

    Google Scholar 

  17. Gebel, T., Rebohle, L., Sun, J., Skopura, W., Nazarov, A.N., Osiyuk, I.: Correlation of charge trapping and electroluminescence in highly efficient Si-based light emitters. Physica E 16, 499–504 (2003)

    Article  CAS  Google Scholar 

  18. Valenta, J., Lalic, N.: J. Linnros.: Electroluminescence microscopy and spectroscopy of silicon nanocrystals in thin SiO\(_{2}\) layers. Opt. Mater. 17, 45–50 (2001)

    Article  CAS  Google Scholar 

  19. Franzò, G., Irrera, A., Moreira, E.C., Miritello, M., Iacona, F., Sanfilippo, D., Di Stefano, G., Fallica, P.G., Priolo, F.: Electroluminescence of silicon nanocrystals in MOS structures. Appl. Phys. A 74, 1–5 (2002)

    Article  Google Scholar 

  20. Walters, R.J., Bourianoff, G.I., Atwater, H.A.: Field-effect electroluminescence in silicon nanocrystals. Nature Mater. 4, 143–146 (2005)

    Article  CAS  Google Scholar 

  21. Cho, K.S., Park, N., Kim, T., Kim, K., Sung, G.Y., Shin, J.H.: High efficiency visible electroluminescence from silicon nanocrystals embedded in silicon nitride using a transparent doping layer. Appl. Phys. Lett. 86, 071909 (2005)

    Article  Google Scholar 

  22. Barreto, J., Perálvarez, M., Rodriguez, J.A., Morales, A., Riera, M., López, M., Garrido, B., Lechuga, L.M., Domínguez, C.: Pulsed electroluminescence in silicon nanocrystals-based devices fabricated by PECVD. Physica E 38, 193–196 (2007)

    Google Scholar 

  23. Perálvarez, M., Carreras, J., Barreto, J., Morales, A., Dominguez, C., Garrido, B.: Efficiency and reliability enhancement of silicon nanocrystal field-effect luminescence from nitride-oxide gate stacks. Appl. Phys. Lett. 92, 241104 (2008)

    Article  Google Scholar 

  24. Lacombe, A., Kadari, B., Beaudoin, F., Barba, D., Martin, F., Ross, G.G.: Electroluminescence microspectroscopy of silicon nanocrystals obtained by Si+ ion implantation in SiO\(_{2}\). Nanotechnology 19, 465702 (2008)

    Article  CAS  Google Scholar 

  25. Fernández, González: A. A., Aceves Mijares, M., Morales Sánchez, A., Leyva, K. M.: Intense whole area electroluminescence from low pressure chemical vapor deposition-silicon-rich oxide based light emitting capacitors. J. Appl. Phys. 108, 043105 (2010)

    Article  Google Scholar 

  26. Cen, Z.H., Chen, T.P., Liu, Z., Liu, Y., Ding, L., Yang, M., Wong, J.I., Yu, S.F., Goh, W.P.: Electrically tunable white-color electroluminescence from Si-implanted silicon nitride thin film. Opt. Express 18, 20439–20444 (2010)

    Article  CAS  Google Scholar 

  27. Cheong, H.J., Tanaka, A., Hippo, D., Usami, K., Suchiya, Y., Mizuta, H., Oda, S.: Visible Electroluminescence from spherical-shaped silicon nanocrystals. Jpn. J. Appl. Phys. 47, 8137–8140 (2008)

    Google Scholar 

  28. Pai, P.G., Chao, S.S., Takagi, Y.: Infrared spectroscopic study of SiOx films produced by plasma enhanced chemical vapor deposition. J. Vac. Sci. Technol. A 4(3), 689–694 (1986)

    Article  CAS  Google Scholar 

  29. Ay, F., Aydinli, A.: Comparative investigation of hydrogen bonding in silicon based PECVD grown dielectrics for optical waveguides. Opt. Mater. 26, 33–46 (2004)

    Article  CAS  Google Scholar 

  30. Fazio, E., Barletta, E., Barreca, F., Neri, F.: Investigation of nanocrystalline silicon phase embedded in SiOx thin films grown by pulsed laser deposition. J. Vac. Sci. Technol. B 23(2), 519–524 (2005)

    Article  CAS  Google Scholar 

  31. Martinet, C., Devine, R.A.B.: Analysis of the vibrational mode spectra of amorphous SiO2 films. J. Appl. Phys. 77(9), 4343–4348 (1995)

    Article  CAS  Google Scholar 

  32. Kouvatsos, D.N., Ioannou-Sougleridis, V., Nassiopoulou, A.G.: Charging effects in silicon nanocrystals embedded in SiO\(_{2}\) films. Mater. Sci. and Eng. B 101, 270–274 (2003)

    Article  Google Scholar 

  33. Kameda, E., Matsuda, T., Emura, Y., Ohzone, T.: Fowler-Nordheim tunneling in MOS capacitors with Si-implanted SiO\(_{2}\). Solid-State Electronics 42(11), 2105–2111 (1998)

    Article  CAS  Google Scholar 

  34. Lelis, A.J., Oldhan, T.R.: Time dependence of switching oxide traps. IEEE Transact. Nuc. Sci. 41(6), 1835–1843 (1994)

    Article  CAS  Google Scholar 

  35. Perera, R., Ikeda, A., Hattori, R., Kuroki, Y.: Trap assisted leakage current conduction in thin silicon oxynitride films grown by rapid thermal oxidation combined microwave excited plasma nitridation. Microelectron. Eng. 65, 357–370 (2003)

    Article  CAS  Google Scholar 

  36. Morales-Sánchez, A., Barreto, J., Domínguez, C., Aceves-Mijares, M., Perálvarez, M., Garrido, B., Luna-López, J.: A.: DC and AC electroluminescence in silicon nanoparticles embedded in silicon-rich oxide films. Nanotechnology 21, 085710 (2010)

    Google Scholar 

  37. Yu, Z., Aceves, M., Ipiña, M.A.: Single electron charging and transport in silicon rich oxide. Nanotechnology 17, 3962–3967 (2006)

    Article  CAS  Google Scholar 

  38. Morales-Sánchez, A., Barreto, J., Domínguez, C., Aceves, M., Yu, Z., Luna-López, J.A.: Coulomb blockade effects in silicon nanoparticles embedded in thin silicon-rich oxide films. Nanotechnology 19, 165401 (2008)

    Article  Google Scholar 

  39. Salonidou, A., Nassiopoulou, A.G., Giannakopoulos, K., Travlos, A., Ioannou-Sougleridis, V., Tsoi, E.: Growth of two-dimensional arrays of silicon nanocrystals in thin SiO\(_{2}\) layers by low pressure chemical vapour deposition and high temperature annealing/oxidation. Investigation of their charging properties. Nanotechnology 15, 1233–1239 (2004)

    CAS  Google Scholar 

  40. Afanas’ev, V. V., Stesmans, A.: Charge state of paramagnetic E’ centre in thermal SiO\(_{2}\) layers on silicon. J. Phys.: Condens. Matter12, 2285–2290 (2000)

    Google Scholar 

  41. Ng, C.Y., Liu, Y., Chen, T.P., Tse, M.S.: Charging/discharging of silicon nanocrystals embedded in an SiO\(_{2}\) matrix inducing reduction/recovery in the total capacitance and tunneling current. Smart Mater. Struct. 15, S43–S46 (2006)

    Article  CAS  Google Scholar 

  42. Perálvarez, M., Barreto, J., Carreras, J., Morales, A., Navarro, D., Lebour, Y., Domínguez, C., Garrido, B.: Si-nanocrystal-based LEDs fabricated by ion implantation and plasma-enhanced chemical vapour deposition. Nanotechnology 20, 405201 (2009)

    Article  Google Scholar 

  43. Luna-López, J.A., Morales-Sánchez, A., Aceves-Mijares, M., Yu, Z., Domínguez, C.: Analysis of surface roughness and its relationship with photoluminescence properties of silicon-rich oxide films. J. Vac. Sci. Technol. A 27(1), 57–62 (2009)

    Article  Google Scholar 

  44. Flores, F.F., Aceves, M., Carrillo, J., Domínguez, J., Falcony, C.: Photoluminescence and cathodoluminescence characteristics of SiO\(_{2}\) and SRO films implanted with Si. Superficies y Vacío 18, 7–13 (2005)

    Google Scholar 

  45. Lopez, R., Aceves, M., Yu Z., Falcony, C., Cathodoluminescence of Silicon Rich Oxide with nitrogen incorporated. 4th International Conference on Electrical and Electronics, Engineering, pp. 341–344 (2007)

    Google Scholar 

  46. Perálvarez, M., García, C., López, M., Garrido, B., Barreto, J., Domínguez, C., Rodríguez, J.A.: Field effect luminescence from Si nanocrystals obtained by plasma-enhanced chemical vapor deposition. Appl. Phys. Lett. 89, 051112 (2006)

    Google Scholar 

  47. Lin, ChF: Liu, C.W., Chen, M.J., Lee, M.H., Lin, I.C.: Electroluminescence at Si band gap energy based on metal-oxide-silicon structures. J of. Appl. Phys. 87(12), 8793–8795 (2000)

    CAS  Google Scholar 

  48. Lin, ChF: Liu, C.W., Chen, M.J., Lee, M.H., Lin, I.C.: Infrared electroluminescence from metal-oxide-semiconductor structures on silicon. J. Phys. Condens. Matter 12, L205–L210 (2000)

    Article  CAS  Google Scholar 

  49. Ray, M., Hossain, S.M., Klie, R.F., Banerjee, K., Ghosh, S.: Free standing luminescent silicon quantum dots: evidence of quantum confinement and defect related transitions. Nanotechnology 21, 505602 (2010)

    Article  Google Scholar 

  50. Morales-Sánchez, A., Aceves-Mijares, M., Monfil-Leyva, K., González, A.A., Luna-López, J.A., Carrillo, J., Domínguez, C., Barreto, J., Flores-Gracia, F.J.: Strong blue and red luminescence in silicon nanoparticles based light emitting capacitors. Applied Physics Letters 99, 171102 (2011)

    Google Scholar 

Download references

Acknowledgments

Dr. Morales acknowledges the support received from project CONACyT-180992.

Author information

Authors and Affiliations

  1. Centro de Investigación en Materiales Avanzados (CIMAV), Alianza Norte 202 Parque de Investigación e Innovación Tecnológica, Apodaca, 66600 , Nuevo León , México

    A. Morales Sánchez & L. Licea Jiménez

  2. Centre for Quantum Photonics, HH Wills Laboratory, University of Bristol, Tyndall Avenue, Bs8, Bristol, UK

    J. Barreto

  3. Instituto de Microelectrónica de Barcelona (CNM-CSIC), Campus UAB, 08193 , Bellaterra, España

    C. Domínguez Horna

  4. Electronics Department, INAOE, Apdo 51, 72000 , Pue. Pue., México

    M. Aceves Mijares

  5. IC-CIDS Benemérita Universidad Autónoma de Puebla, Ed. 103 C or D, C.U., Col. San Manuel, 72570 , Puebla, México

    J. A. Luna López

Authors
  1. A. Morales Sánchez
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J. Barreto
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. C. Domínguez Horna
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. Aceves Mijares
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. J. A. Luna López
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. L. Licea Jiménez
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A. Morales Sánchez .

Editor information

Editors and Affiliations

  1. cState Key Laboratory of Electronic, University of Electronic Science and Technology of China, Chengdu, People's Republic of China

    Handong Li

  2. State Key Laboratory of Electronic Thin, University of Electronic Science and Technology of China, Chengdu, People's Republic of China

    Jiang Wu

  3. State Key Laboratory of Electronic, University of Electronic Science and Technology, Chengdu, People's Republic of China

    Zhiming M. Wang

Rights and permissions

Reprints and permissions

Copyright information

© 2013 Springer Science+Business Media New York

About this chapter

Cite this chapter

Sánchez, A.M., Barreto, J., Horna, C.D., Mijares, M.A., Luna López, J.A., Jiménez, L.L. (2013). Silicon Nanoparticles-Based Light Emitting Capacitors. In: Li, H., Wu, J., Wang, Z. (eds) Silicon-based Nanomaterials. Springer Series in Materials Science, vol 187. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-8169-0_6

Download citation

Publish with us

Policies and ethics

Search

Navigation