Fabrication of Semiconductor Quantum Dot Molecules: Droplet Epitaxy and Local Oxidation Nanolithography Techniques

  • Pablo Alonso-GonzálezEmail author
  • Javier Martín-Sánchez
Part of the Lecture Notes in Nanoscale Science and Technology book series (LNNST, volume 14)


A semiconductor quantum dot molecule (QDM) composed of two interacting quantum dots (QDs) is the simplest coupled system formed by semiconductor quantum nanostructures. Potentially, a QDM is the ideal building block for the realization of a quantum computation device. However, the fabrication of QDMs is far from being a straightforward task, particularly if a precise control of QDs density, size, or spatial location is required. Recently, an important improvement in the control of these properties has been achieved by using patterned semiconductor substrates followed by preferential epitaxial growth. In this chapter we will overview two of such fabrication methods, which are based on: (1) in situ droplet epitaxy “nanodrilling” and (2) ex situ local oxidation nanolithography.


GaAs Surface Preferential Nucleation High Optical Quality Atomic Force Microscopy Topography Double Structure 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



Atomic force microscopy local anodic oxidation


Atomic layer molecular beam epitaxy


Beam equivalent pressure


Charge coupled device


Molecular beam epitaxy








Quantum dot


Quantum dot molecule


Relative humidity


Root mean square


Transmission electron microscopy


Wetting layer



The authors would like to acknowledge the MBE group of the “Instituto de Microelectrónica de Madrid (IMM-CNM-CSIC)” where these works were carried out.


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© Springer Science+Business Media New York 2014

Authors and Affiliations

  • Pablo Alonso-González
    • 1
    Email author
  • Javier Martín-Sánchez
    • 1
  1. 1.Instituto de Microelectrónica de Madrid (CNM-CSIC)Tres CantosSpain

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