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Electrodes and Heaters in MOX-Based Gas Sensors

  • Ghenadii Korotcenkov
Chapter
Part of the Integrated Analytical Systems book series (ANASYS)

Abstract

Materials which can be used for fabricating electrodes and heaters in metal oxide chemiresistors and solid electrolyte-based gas sensors are the object of analysis in the present chapter. It is known that another crucial issue, beyond the sensing layer and the sensor design, is the choice of the metal used for making electrical contacts to the sensing layer. The heater is also an important part of the gas sensor because the majority of gas sensors, including conductometric MOX sensors, thermoelectric sensors, and pelistors, operate at high temperatures. The requirements for materials aimed at the fabrication of electrodes and heaters, their parameters, and their limitations are discussed. The chapter includes 8 figures, 2 tables, and 127 references.

Keywords

Electrode Material Triple Phase Boundary Polysilicon Layer Single Metal Oxide Conductive Metal Oxide 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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© Springer Science+Business Media, LLC 2013

Authors and Affiliations

  • Ghenadii Korotcenkov
    • 1
  1. 1.Materials Science and EngineeringGwangju Institute of Science and TechnologyGwangjuKorea, Republic of (South Korea)

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