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Materials for Sensor Platforms and Packaging

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Handbook of Gas Sensor Materials

Part of the book series: Integrated Analytical Systems ((ANASYS))

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Abstract

Platforms are an important element of gas sensors. The present chapter describes different approaches and materials used for platform fabrication. In particular, in this chapter one can find descriptions of conventional platforms, micromachining hotplates, flexible platforms, cantilever-based platforms, and platforms based on paper. Advantages and disadvantages of these platforms used for gas sensor fabrication are analyzed. The chapter includes 16 figures, 7 tables, and 123 references.

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  1. Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju, Korea, Republic of (South Korea)

    Ghenadii Korotcenkov

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  1. Ghenadii Korotcenkov
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Korotcenkov, G. (2013). Materials for Sensor Platforms and Packaging. In: Handbook of Gas Sensor Materials. Integrated Analytical Systems. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-7165-3_7

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