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Materials for Piezoelectric-Based Gas Sensors

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Book cover Handbook of Gas Sensor Materials

Part of the book series: Integrated Analytical Systems ((ANASYS))

Abstract

Piezoelectric-based or acoustic wave (AW) sensors such as surface acoustic wave (SAW), quartz crystal microbalance (QCM) or bulk acoustic wave (BAW), and cantilever-based devices create a specific class of gas sensors widely used in various applications. The present chapter gives detailed information about piezoelectric materials which can be used in these devices. Descriptions of materials acceptable for fabrication of both interdigital transducers (IDT) in piezoelectric-based gas sensors and high temperature AW devices are given. Materials used for forming gas sensing layers, which provide high sensitivity and selectivity to acoustic wave devices, and approaches used for miniaturization of piezoelectric sensors are also analyzed. The chapter includes 7 figures, 11 tables, and 82 references.

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  1. Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju, Korea, Republic of (South Korea)

    Ghenadii Korotcenkov

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  1. Ghenadii Korotcenkov
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Korotcenkov, G. (2013). Materials for Piezoelectric-Based Gas Sensors. In: Handbook of Gas Sensor Materials. Integrated Analytical Systems. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-7165-3_13

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