Abstract
Micro-manufacturing technologies started in the late 1950s mainly linked to the electronic industry, for producing circuits with improved performance, without a dramatic increase of final device size. Such beginning was very connected to the properties of silicon, which can be easily micromachined using chemical attacks through specially designed patterns or masks.
The progressive adaptation of these techniques for micromachining alternative materials, including metals, ceramics, and polymers, and the introduction of novel manufacturing technologies, including laser micro-manufacturing, electron-/ion-beam milling, micro-replication tools, and high-precision additive manufacturing, have greatly promoted final quality of the obtained microsystems, as well as the incorporation of additional features and the combination of materials, in many cases using thin-film technologies for special contact phenomena.
The applications of microsystems in the biomedical field are indeed remarkable and continuously evolving thanks to progresses in the aforementioned micro-technologies, as explained in detail in this chapter. As living organisms are made up of cells, whose dimensions typically range from 10 to 100 μm, micro-manufactured devices (with details precisely in that range) are very well suited to interacting at a cellular level for promoting innovative diagnostic and therapeutic approaches.
Main fields of application of microsystems in Biomedical Engineering are also discussed and several examples provided, as a basis for discussion on future trends, present knowledge, and technical challenges. Connections with the following chapter, about nano-manufacturing, are also established by paying attention to relevant new tools working between the “micro” and the “nano” world.
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Lantada, A.D., Morgado, P.L., García, P.O. (2013). Micro-manufacturing Technologies for Biodevices: Interacting at a Cellular Scale. In: Lantada, A. (eds) Handbook on Advanced Design and Manufacturing Technologies for Biomedical Devices. Springer, Boston, MA. https://doi.org/10.1007/978-1-4614-6789-2_12
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