A Hybrid Control Approach to Nanopositioning
Precise position control on the nanometer and subnanometer scale, referred to as nanopositioning, is a key enabler for nanoscale science and engineering. In nanopositioning, feedback control is essential to meet the stringent requirements on accuracy, stability, and repeatability in the presence of model uncertainties and environmental disturbances. In this chapter, we review a new hybrid control approach to nanopositioning which is based on the combination of a continuous-time control law with impulsive modifications of the controller states. By using impulsive control, the limitations of conventional linear controllers can be overcome, such as the inherent trade-off between closed-loop bandwidth and resolution. We review the related literature, present an in-depth analysis of the stability and performance characteristics of impulsive control, and verify the theoretical conclusions experimentally using a custom-built atomic force microscope.
We thank Urs Egger and Walter Häberle for their support with the mechanical and electronic hardware used in the experiments. Special thanks go to Haris Pozidis and Evangelos Eleftheriou for their support of this work.
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