CO\(_2\) Gas Sensor Using Resonant Frequency Changes in Micro-Cantilever

  • S. Subhashini
  • A. Vimala Juliet
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 131)


Our country India is facing some drastic changes in the climatic conditions due to the heating effect caused by various greenhouse gases. The most harmful gas among them is carbon dioxide and is increasing at an uncontrolled rate. This paper aims in finding out the quantity of the major polluting gas carbon dioxide. The gravimetric sensor works by absorbing the chemical in a CO\(_2\) sponge, which alters the overall mass of the sensing element i.e., a cantilever, thereby its resonant frequency. Here a micro-cantilever beam is fabricated using selective alumina—silicate gel coatings on the surface to selectively absorb CO\(_2\). As the gases are absorbed the mass increases and hence there is a change in resonant frequency. This change in frequency gives the measure of the quantity of gas present in that environment. The major expected advantage of this technique would be the repeatability of the sensor that is used.


Resonant Frequency Porous Silicon Sensitive Layer Resonance Frequency Shift Selective Coating 
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Copyright information

© Springer Science+Business Media New York 2013

Authors and Affiliations

  1. 1.Sathyabama UniversityChennaiIndia
  2. 2.Department of EIESRM UniversityChennaiIndia

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