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Materials and Devices for MEMS Piezoelectric Energy Harvesting

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Advances in Energy Harvesting Methods

Abstract

Piezoelectric vibration energy harvesters (PVEHs) for microelectromechanical systems (MEMS) have received considerable attention as an enabling technology for self-powered wireless sensor networks. MEMS-PVEHs are particularly attractive because of the potential to deliver power required for sensor nodes and their ability to be integrated concurrently with the microfabrication of electronic circuits such as sensor nodes. This chapter consists of four subsections, starting with Sect. 17.1, where various piezoelectric materials commonly used for MEMS-scale PVEHs are reviewed. Typical device configurations of PVEH systems are introduced in Sect. 17.2, followed by analytical modeling of different configurations in Sect. 17.3 to link material characteristics to device performance: standard capacitor type electrodes for {3–1} mode of operation and interdigitated electrodes (IDTEs) for {3–3} mode of operation. In the last section, fabrication and characterization of MEMS-scale PVEHs in both of these modes are presented with model–experiment comparisons.

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Part of this work (S. Hong) was carried out at Argonne National Laboratory (ANL), a US DOE Science Laboratory operated under contract no. DE-AC02-06CH11357 by UChicago Argonne, LLC.

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Authors and Affiliations

  1. Department of Materials and Science, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA

    Miso Kim

  2. Division of Industrial Metrology, Center for Safety Measurement, Korea Research Institute of Standards and Science, 267 Gajeong-Ro, Yuseong-Gu, Daejeon, 305-340, Republic of Korea

    Miso Kim

  3. School of Engineering, Brown University, Providence, RI, 02912, USA

    Seung-Hyun Kim

  4. Materials Science Division and Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL, 60439, USA

    Seungbum Hong

Authors
  1. Miso Kim
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  2. Seung-Hyun Kim
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  3. Seungbum Hong
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Correspondence to Miso Kim .

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Editors and Affiliations

  1. Steinman Hall T-228, The City College of New York, Street at Convent Avenue 140, New York, 10031, New York, USA

    Niell Elvin

  2. , G. W. Woodruff School of, Georgia Institute of Technology, J. Erskine Love Jr. Manufacturing Building 126, Atlanta, 30332, Georgia, USA

    Alper Erturk

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Kim, M., Kim, SH., Hong, S. (2013). Materials and Devices for MEMS Piezoelectric Energy Harvesting. In: Elvin, N., Erturk, A. (eds) Advances in Energy Harvesting Methods. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-5705-3_17

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  • DOI: https://doi.org/10.1007/978-1-4614-5705-3_17

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  • Publisher Name: Springer, New York, NY

  • Print ISBN: 978-1-4614-5704-6

  • Online ISBN: 978-1-4614-5705-3

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