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New Insight into Pile-Up in Thin Film Indentation

  • Kevin Schwieker
  • James Frye
  • Barton C. Prorok
Conference paper
Part of the Conference Proceedings of the Society for Experimental Mechanics Series book series (CPSEMS)

Abstract

This work builds involves leveraging our recent thin film mechanics model on the discontinuous transfer of strain from the film to the substrate. In applying this model with well-defined film and substrate properties we were able to decouple the effects of elastic modulus and Poisson’s ratio mismatch in the indentation process. In doing so we identified new insight in the processes of pile-up and strong evidence suggested a dependence on film thickness and ratios of film/substrate of elastic modulus and Poisson’s ratio. Atomic force microscopy was employed to characterize the degree of pile-up and correlate it with the above dependencies. We believe these efforts will enable the prediction of the degree of pile-up and subsequently the removal of its influence in measuring thin film behavior.

Keywords

Elastic Recovery Material Combination Compliant Substrate Indent Depth Platinum Film 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

  1. 1.
    Doerner MF, Nix WD (1986) A method for interpreting the data from depth-sensing indentation. J Mater Res 1:601–609CrossRefGoogle Scholar
  2. 2.
    Hay J, Crawford B (2011) Measuring substrate-independent modulus of thin films. J Mater Res 26:727–738CrossRefGoogle Scholar
  3. 3.
    King RB (1987) Elastic analysis of some punch problems for a layered medium. Int J Solids Struct 23:1657–1664zbMATHCrossRefGoogle Scholar
  4. 4.
    Pharr GM, Strader JH, Oliver WC (2009) Critical issues in making small-depth mechanical property measurements by nanoindentation with continuous stiffness measurement. J Mater Res 24:653–666CrossRefGoogle Scholar
  5. 5.
    Saha R, Nix WD (2002) Effects of the substrate on the determination of thin film mechanical properties by nanoindentation. Acta Mater 50:23–38CrossRefGoogle Scholar
  6. 6.
    Zhou B, Prorok BC (2009) A discontinuous elastic interface transfer model of thin film nanoindentation. Exp Mech 50:793–801CrossRefGoogle Scholar
  7. 7.
    Zhou B, Prorok BC (2010) A new paradigm in thin film indentation. J Mater Res 25:1671–1678CrossRefGoogle Scholar
  8. 8.
    McElhaney KW, Vlassak JJ, Nix WD (1998) Determination of indenter tip geometry and indentation contact area for depth-sensing indentation experiments. J Mater Res 13:7CrossRefGoogle Scholar

Copyright information

© The Society for Experimental Mechanics 2013

Authors and Affiliations

  • Kevin Schwieker
    • 1
  • James Frye
    • 1
  • Barton C. Prorok
    • 1
  1. 1.Department of Mechanical EngineeringAuburn UniversityAuburnUSA

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