Abstract
Undesirable stiction, which results from the contact between surfaces, is a major failure mode in micro-switches. Indeed the adhesive forces can become so important that the two surfaces remain permanently glued, limiting the life-time of the MEMS. This is especially true when the contact happens between surfaces where elasto-plastic asperities deform permanently until the surfaces reach plastic accommodation, increasing the surface forces. To predict this behavior, a micro adhesive-contact model is developed, which accounts for the surfaces topography evolutions during elasto-plastic contacts. This model can be used at a higher scale to study the MEMS behavior, and thus its life-time. The MEMS devices studied here are assumed to work in a dry environment. In these operating conditions only the Van der Waals forces have to be considered for adhesion. For illustration purpose, an electrostatic-structural analysis is performed on a micro-switch. To determine the degree of plasticity involved, the impact energy of the movable electrode at pull-in is estimated. Thus the maximal adhesive force is predicted using the developed model.
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References
Van Spengen W, Puers R, DeWolf I (2003) On the physics of stiction and its impact on the reliability of microstructures. J Adhes Sci Technol 17(4):563–582
Do C, Hill M, Lishchynska M, Cychowski M, Delaney K (2011) Modeling, simulation and validation of the dynamic performance of a single-pole single-throw RF-MEMS contact switch. In: 2011 12th international conference on thermal, mechanical and multi-physics simulation, and experiments in microelectronics and microsystems (EuroSimE), Linz, Austria, April 2011, pp 1–6
Wu L, Noels L, Rochus V, Pustan M, Golinval J-C (2011) A micro-macroapproach to predict stiction due to surface contact in microelectromechanical systems. J Microelectromech Syst 20(4):976–990
Wu L, Rochus V, Noels L, Golinval J-C (2009) Influence of adhesive rough surface contact on microswitches. J Appl Phys 106(11):113502-1–113502-10
Johnson K, Kendall K, Roberts A (1971) Surface energy and the contact of elastic solids. Proc R Soc Lond A Math Phys Sci 324(1558):301–313
Derjaguin B, Muller V, Toporov Y (1975) Effect of contact deformation on the adhesion of elastic solids. J Colloid Interface Sci 53(2):314–326
Maugis D (1992) Adhesion of spheres: the JKRDMT transition using a Dugdale model. J Colloid Interface Sci 150(1):243–269
Kim K, McMeeking R, Johnson K (1998) Adhesion, slip, cohesive zones and energy fluxes for elastic spheres in contact. J Mech Phys Solids 46(2):243–266
Greenwood J, Williamson J (1966) Contact of nominally flat surfaces. Proc R Soc Lond A Math Phys Eng Sci 295(1442):300–319
Greenwood J, Tripp J (1971) The contact of two nominally flat rough surfaces. Proc Inst Mech Eng 1847–1996 185(1970):625–633
Jones R (2004) Models for contact loading and unloading of a rough surface. Int J Eng Sci 42(17–18):1931–1947
Williams J (2005) The influence of repeated loading, residual stresses and shakedown on the behaviour of tribological contacts. Tribol Int 38(9):786–797
Majumder S, McGruer N, Adams G, Zavracky P, Morrison R, Krim J (2001) Study of contacts in an electrostatically actuated microswitch. Sens Actuat A Phys 93(1):19–26
Wu L, Golinval J-C, Noels L. A micro model for elasto-plastic adhesive-contact in micro-switches. Tribol Int (submitted)
Chang W, Etsion I, Bogy D (1987) An elasticplastic model for the contact of rough surfaces. J Tribol 109(2):257–263
Jackson R, Green I (2005) A finite element study of elasto-plastic hemispherical contact against a rigid flat. J Tribol 127(2):343–354
Etsion I, Kligerman Y, Kadin Y (2005) Unloading of an elastic–plastic loaded spherical contact. Int J Solids Struct 42(13):3716–3729
Kadin Y, Kligerman Y, Etsion I (2007) Cyclic loading of an elasticplastic adhesive spherical microcontact. J Appl Phys 104(7):073522-1–073522-8
Du Y, Chen L, McGruer N, Adams G, Etsion I (2007) A finite element model of loading and unloading of an asperity contact with adhesion and plasticity. J Colloid Interface Sci 312(2):522–528
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© 2013 The Society for Experimental Mechanics
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Wu, L., Golinval, JC., Noels, L. (2013). Stiction Failure in Microswitches Due to Elasto-Plastic Adhesive Contacts. In: Shaw, G., Prorok, B., Starman, L. (eds) MEMS and Nanotechnology, Volume 6. Conference Proceedings of the Society for Experimental Mechanics Series. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-4436-7_11
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DOI: https://doi.org/10.1007/978-1-4614-4436-7_11
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