Recent developments in fabrication, characterization, and understanding of local surface plasmon resonances and surface plasmon waveguides have fuelled the development of a new generation of surface plasmon based biosensors, mainly based on local refractive index sensing and surface enhanced Raman scattering [1, 2]. Although the actual sensor has scaled to the nanoscale, the system still requires bulky optical components, such as light sources, lenses, objectives, and detectors. Integrating sources and/or detectors with the plasmonic sensor can pave the way to small-footprint photodetectors. In this chapter, we demonstrate direct electrical detection of surface plasmon resonators and integrated detection and generation of deep-subwavelength guided plasmons in metal-insulator-metal (MIM) waveguides. We will discuss these different devices, including optical/electrical characterization, the comparison with simulations, and their relevance for integrated biosensors.
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