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High-Quality Image Formation by Nonlocal Means Applied to High-Angle Annular Dark-Field Scanning Transmission Electron Microscopy (HAADF–STEM)

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Modeling Nanoscale Imaging in Electron Microscopy

Abstract

We outline a new systematic approach to extracting high-quality information from HAADF–STEM images which will be beneficial to the characterization of beam-sensitive materials. The idea is to treat several, possibly many, low-electron dose images with specially adapted digital image processing concepts at a minimum allowable spatial resolution. Our goal is to keep the overall cumulative electron dose as low as possible while still staying close to an acceptable level of physical resolution. We shall present the main conceptual imaging concepts and restoration methods that we believe are suitable for carrying out such a program and, in particular, allow one to correct special acquisition artifacts which result in blurring, aliasing, rastering distortions, and noise.

This research was supported in part by the College of Arts and Sciences at the University of South Carolina; the Leibniz program and Special Priority Program SPP 1324, funded by German Research Foundation; MURI ARO Grant # W911NF-07-1-0185; NSF Grant # DMS-0915104; and National Academies Keck Futures Initiative grant NAKFI IS11.

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Acknowledgements

The authors would like to thank Amit Singer and Yoel Shkolnisky for interesting discussions and for introducing us to the method of nonlocal means. We are also indebted to Benjamin Berkels for making his image registration code available to us.

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Correspondence to Peter Binev .

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Binev, P. et al. (2012). High-Quality Image Formation by Nonlocal Means Applied to High-Angle Annular Dark-Field Scanning Transmission Electron Microscopy (HAADF–STEM). In: Vogt, T., Dahmen, W., Binev, P. (eds) Modeling Nanoscale Imaging in Electron Microscopy. Nanostructure Science and Technology. Springer, Boston, MA. https://doi.org/10.1007/978-1-4614-2191-7_5

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