Understanding Cleaner Efficiency for BARC (“Bottom Anti-Reflective Coating”) After Plasma Etch in Dual Damascene Structures Through the Practical Use of Molecular Modeling Trends

  • Nancy Iwamoto
  • Deborah Yellowaga
  • Amy Larson
  • Ben Palmer
  • Teri Baldwin-Hendricks
Chapter

Abstract

This work describes the surface energy and reactivity modeling of the Honeywell cleaner technology that has demonstrated an inorganic Bottom Anti-Reflective Coating removal solution with significantly higher removal rates and etching selectivity compared to currently available products. We will show how molecular modeling helped to influence the development of the cleaner formulation and the impact on experiments.

Keywords

Hydrolysis Migration Silicate Cage Trench 

References

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Copyright information

© Springer Science+Business Media, LLC 2012

Authors and Affiliations

  • Nancy Iwamoto
    • 1
  • Deborah Yellowaga
    • 1
  • Amy Larson
    • 1
  • Ben Palmer
    • 1
  • Teri Baldwin-Hendricks
    • 1
  1. 1.Honeywell Electronic ChemicalsChandlerUSA

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