Abstract
In this work vertical, high aspect-ratio one-dimensional photonic crystals (1D-PhCs) featuring a reflectivity notch at λ = 1.55 μm were designed and fabricated by silicon electrochemical micromachining. Optical characterization of as-fabricated 1D-PhC structures was performed by acquiring reflectivity spectra, in the infrared region, on different locations of the devices, at normal incidence. Experimental data are in good agreement with theoretical reflectivity spectra, which were calculated by taking into account non-idealities of both the 1D-PhC structure and the measuring setup.
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References
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Acknowledgments
This research was partially supported by PRIN-MIUR and Cariplo Fundation. Currently, F. Carpignano and S. Surdo hold a fellowship funded by Fondazione Alma Mater Ticinensis, Pavia, Italy.
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Surdo, S., Strambini, L.M., Barillaro, G., Carpignano, F., Merlo, S. (2012). High-Order One-Dimensional Silicon Photonic Crystals with a Reflectivity Notch at λ = 1.55 μm. In: D’Amico, A., Di Natale, C., Mosiello, L., Zappa, G. (eds) Sensors and Microsystems. Lecture Notes in Electrical Engineering, vol 109. Springer, Boston, MA. https://doi.org/10.1007/978-1-4614-0935-9_39
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DOI: https://doi.org/10.1007/978-1-4614-0935-9_39
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