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MEMS Reliability for Space Applications by Elimination of Potential Failure Modes through Analysis

  • Rohit Soni
Conference paper
Part of the Conference Proceedings of the Society for Experimental Mechanics Series book series (CPSEMS)

Abstract

As the design of Micro-Electro-Mechanical System (MEMS) devices matures and their application extends to critical areas, the issues of reliability and long-term survivability become increasingly important. This paper reviews some general approaches to addressing the reliability and qualification of MEMS devices for space applications. The failure modes associated with different types of MEMS devices that are likely to occur, not only under normal terrestrial operations, but also those that are encountered in the harsh environments of space, will be identified.

Keywords

MEMS devices reliability qualification failure mode analysis space environments 

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References

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Copyright information

© Springer Science+Business Media, LLC 2011

Authors and Affiliations

  • Rohit Soni
    • 1
  1. 1.S.E.(Mechanical Engineering) Mechanical Engineering DepartmentNagesh Karajagi Orchid College of Engg & Tech.SolapurIndia

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