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Surface Composition by Analysis of Neutral and Ion Impact Radiation

  • Chapter
Characterization of Solid Surfaces

Abstract

A recently developed method for surface composition analysis is the SCANIIR (Surface Composition by Analysis of Neutral and Ion Impact Radiation) surface analysis technique.(1) This method has evolved from recent experiments(1–6) which show that visible, ultraviolet, and infrared radiation is produced when beams of low-energy ions or neutral particles impact on a solid surface.* Surface constituents are determined by identification and analysis of optical lines and bands that are produced in the collision process.

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Author information

Authors and Affiliations

  1. Bell Laboratories, Murray Hill, New Jersey, USA

    C. W. White, D. L. Simms & N. H. Tolk

Authors
  1. C. W. White
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  2. D. L. Simms
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  3. N. H. Tolk
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Editor information

Editors and Affiliations

  1. Materials Characterization Laboratory, Texas Instruments Incorporated, Dallas, Texas, USA

    Philip F. Kane  & Graydon B. Larrabee  & 

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© 1974 Plenum Press, New York

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White, C.W., Simms, D.L., Tolk, N.H. (1974). Surface Composition by Analysis of Neutral and Ion Impact Radiation. In: Kane, P.F., Larrabee, G.B. (eds) Characterization of Solid Surfaces. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-4490-2_24

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  • DOI: https://doi.org/10.1007/978-1-4613-4490-2_24

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-4492-6

  • Online ISBN: 978-1-4613-4490-2

  • eBook Packages: Springer Book Archive

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