Surface Composition by Analysis of Neutral and Ion Impact Radiation
A recently developed method for surface composition analysis is the SCANIIR (Surface Composition by Analysis of Neutral and Ion Impact Radiation) surface analysis technique.(1) This method has evolved from recent experiments(1–6) which show that visible, ultraviolet, and infrared radiation is produced when beams of low-energy ions or neutral particles impact on a solid surface.* Surface constituents are determined by identification and analysis of optical lines and bands that are produced in the collision process.
KeywordsOptical Radiation Excited Atom Si02 Film Optical Line Neutral Beam
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