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Characterization of Solid Surfaces pp 509–575Cite as

Analytical Auger Electron Spectroscopy

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Abstract

Auger spectroscopy explores the electronic energy levels in atoms and solids. as an analytical technique, it has been applied to investigations of the first few atom layers of surfaces. the term “Auger process” has come to denote any electron de-excitation in which the de-excitation energy is transferred to a second electron, the “Auger electron.” Because of the discrete nature of most electronic energy levels, Auger electrons are best characterized by their energies. Therefore, the Auger process can be analyzed by measuring the energy distribution N(E) of Auger electrons, where E is the electron energy. Experimental N(E) curves contain much more information than just those concerning the Auger process, and this extra information adds greatly to the usefulness of the data. Low-energy Auger electrons (≲ 1 keV) can escape from only the first several atom layers of a surface because they are strongly absorbed by even a monolayer of atoms. This property gives Auger spectroscopy its high surface sensitivity.

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  1. Bell Laboratories, Murray Hill, New Jersey, USA

    Chuan C. Chang

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  1. Materials Characterization Laboratory, Texas Instruments Incorporated, Dallas, Texas, USA

    Philip F. Kane  & Graydon B. Larrabee  & 

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Chang, C.C. (1974). Analytical Auger Electron Spectroscopy. In: Kane, P.F., Larrabee, G.B. (eds) Characterization of Solid Surfaces. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-4490-2_21

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