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Electron Probe Microanalysis

  • Chapter
Characterization of Solid Surfaces

Abstract

Electron probe microanalysis is an analytical technique that may be used to determine the chemical composition of a solid specimen weighing as little as 10−11 gram and having a volume as small as one cubic micron. the primary advantage of electron probe microanalysis over other analytical methods is the possibility of obtaining a quantitative analysis of a specimen of very small size.

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Author information

Authors and Affiliations

  1. Research and Development Laboratories, Sprague Electric Company, North Adams, Massachusetts, USA

    Gudrun A. Hutchins

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  1. Gudrun A. Hutchins
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Editors and Affiliations

  1. Materials Characterization Laboratory, Texas Instruments Incorporated, Dallas, Texas, USA

    Philip F. Kane  & Graydon B. Larrabee  & 

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© 1974 Plenum Press, New York

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Hutchins, G.A. (1974). Electron Probe Microanalysis. In: Kane, P.F., Larrabee, G.B. (eds) Characterization of Solid Surfaces. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-4490-2_19

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  • DOI: https://doi.org/10.1007/978-1-4613-4490-2_19

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-4492-6

  • Online ISBN: 978-1-4613-4490-2

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