Abstract
By 1911, Rutherford and his co-workers had described the elastic scattering of energetic ions, yet it was not until 1957 that Rubin, Passell, and Bailey(1) exploited this nuclear interaction as an analytical tool. Until 1966, only a few applications were found for this method since it is not generally useful in identifying and determining impurities scattered throughout the bulk of a sample. Since that time, however, three factors have promoted its use: (1) an increasing need, particularly in the field of solid-state devices for the determination of foreign atoms concentrated on or within a few microns of the surface of an otherwise pure material, (2) a realization of the potential for obtaining concentration changes both with depth and across surfaces, and (3) the facility with which elastic scattering can be combined with channeling (see Section 2.5) to reveal the location of foreign atoms in the unit cell of single crystals.
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References
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© 1974 Plenum Press, New York
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Mackintosh, W.D. (1974). Rutherford Scattering. In: Kane, P.F., Larrabee, G.B. (eds) Characterization of Solid Surfaces. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-4490-2_17
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DOI: https://doi.org/10.1007/978-1-4613-4490-2_17
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