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Microanalysis of Thin Films and Fine Structure

  • R. B. Bolon
  • E. Lifshin
  • M. F. Ciccarelli

Abstract

Traditionally, quantitative electron microanalysis was almost exclusively performed with normal electron beam incidence on flat samples containing phases of sufficient size (5–10 μm) to ensure complete containment of the volume of x-ray excitation. These restrictions were chosen to give a symmetric distribution of the detected x-rays about the electron optical axis, thereby simplifying the form of the quantitative correction expressions given in Chapter IX. Today, however, electron microprobes have evolved into dual-purpose, high-resolution SEM-EPMA’s equipped with specimen stages capable of tilt and rotation in addition to X, Y, and Z translations. Questions therefore arise of how small a region can be analyzed chemically, what method of analysis should be used, and how data collection can be optimized. It will be shown that the principal factors affecting x-ray spatial resolution are (1) probe position and stability, (2) probe current as a function of diameter, (3) electron penetration and scattering, and (4) indirect x-ray excitation. These factors will then be related to the study of thin films and fine structure.

Keywords

Monte Carlo Gold Film Monte Carlo Calculation Probe Size Electron Trajectory 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Plenum Press, New York 1975

Authors and Affiliations

  • R. B. Bolon
    • 1
  • E. Lifshin
    • 1
  • M. F. Ciccarelli
    • 1
  1. 1.General Electric Corporate Research and DevelopmentSchenectadyUSA

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