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Materials Modification by Ion Implantation

  • Chapter
Surface Modification and Alloying

Part of the book series: NATO Conference Series ((SNS,volume 8))

Abstract

The use of ion implantation for the controlled modification of surface sensitive properties has been a rapidly growing research field in the last few years, evidenced by several topical symposia and conference proceedings (see for example Benenson et al., (1981). The two principal thrusts of current research involve the use of implantation as (i) a metallurgical tool for studying basic mechanisms in areas such as aqueous corrosion, high temperature oxidation and impurity trapping as well as (ii) a means of beneficially modifying the mechanical or chemical properties of materials. This chapter includes examples of both usages and will review the present status of some of the most active research fields outside of the semiconductor area with an attempt to indicate the required direction and potential payoff of further work. The application of lasers to improve surface sensitive properties will be referred to in the next chapter. Table I shows a compilation of material properties influenced by ion implantation from Dearnaley (1978).

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Authors and Affiliations

  1. Naval Research Laboratory, Washington, D.C., USA

    J. K. Hirvonen

  2. State University of New York, Stony Brook, New York, USA

    C. R. Clayton

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  1. J. K. Hirvonen
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  2. C. R. Clayton
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  1. Bell Laboratories, Murray Hill, New Jersey, USA

    J. M. Poate  & D. C. Jacobson  & 

  2. University of Catania, Catania, Italy

    G. Foti

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© 1983 Plenum Press, New York

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Hirvonen, J.K., Clayton, C.R. (1983). Materials Modification by Ion Implantation. In: Poate, J.M., Foti, G., Jacobson, D.C. (eds) Surface Modification and Alloying. NATO Conference Series, vol 8. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-3733-1_12

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  • DOI: https://doi.org/10.1007/978-1-4613-3733-1_12

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