Abstract
The potential application of Langmuir-Blodgett-deposited films in microelectronics is discussed. The application areas which appear most promising are those requiring near perfect and uniformly thick films in the thickness range 2.5–50 nm. Three areas are discussed: the use of Langmuir-Blodgett films as electron resists in submicron device fabrication; the use of these films as insulators in metal-insulator-semiconductor (MIS) structures in which the semiconductor is a compound one; and the use of Langmuir-Blodgett films as tunneling barriers in Josephson junction electronic circuits. It is pointed out that, while preliminary evidence indicates high potential payoff for these films, the amount of data and research is very limited.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
G. L. Gaines, Jr., Insoluble Monolayers at Liquid-Gas Interfaces, Interscience, New York, 1966.
P. S. Vincett and G. G. Roberts, Thin Solid Films 68, 135 (1980).
J. S. Greeneich, Electron-Beam Technology in Microelectronic Fabrication, p. 60, edited by G. R. Brewer, Academic Press, New York, 1980.
A. Barraud, C. Rosilio and A. Ruaudel-Teixier, J. Vac. Sci. Technol. 16, 2003 (1979).
A. Barraud, Thin Solid Films 99, 317 (1983).
G. Fariss, J. Lando, and S. Rickert, Thin Solid Films 99, 305 (1983).
G. G. Roberts, K. P. Pande, and W. A. Barlow, Solid State and Electron Devices 2, 169 (1978).
K. K. Kan, G. G. Roberts, and M. C. Petty, Thin Solid Films 99, 291 (1983).
G. L. Larkins, Jr., C. W. Burkhart, E. D. Thompson, J. B. Lando and E. Ortiz, Bull. Am. Phys. Soc. 27, 639 (1982); Thin Solid Films 99, 277 (1983).
G. L. Larkins, Jr., E. D. Thompson, M. J. Deen, C. W. Burkhart, J. B. Lando, IEEE Trans. Magn. MAG-19, 980 (1983); Bull. Am. Phys. Soc. 28, 568 (1983).
J. M. Greiner, et. al., IBM J. Res. and Devel. 24, 195 (1980).
A. Cemel, T. Fort, Jr., J. B. Lando, J. Polym. Sci., Part A-1, 10, 2061 (1972).
D. R. Day and J. B. Lando, Macromolecules 13, 1478, 1484 (1980).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1984 Plenum Press, New York
About this chapter
Cite this chapter
Thompson, E.D. (1984). Langmuir-Blodgett Films in Microelectronics. In: Adey, W.R., Lawrence, A.F. (eds) Nonlinear Electrodynamics in Biological Systems. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-2789-9_17
Download citation
DOI: https://doi.org/10.1007/978-1-4613-2789-9_17
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4612-9720-8
Online ISBN: 978-1-4613-2789-9
eBook Packages: Springer Book Archive