Abstract
Computer-assisted ultrasonic tomography has received much attention in recent years. Acoustic microscopy is an important branch of non-destructive evaluation which provides high-resolution imaging of the detailed structure of an object. STAM (Scanning Tomographic Acoustic Microscope) is a system capable of producing tomographic images by scanning the source or rotating the specimen to generate a sequence of tomographic projections. This system has advantages over conventional approaches, especially for complex objects with planar structure such as integrated-circuit chips. An earlier paper provided the analysis and the reconstruction algorithms for the signal processing of planar tomographic systems including an algorithm for “back-and-forth” propagation. This paper summarizes the modifications and revisions of this latter algorithm as applied to microscopic digital imaging. Two different schemes of rotation to acquire STAM data and the corresponding reconstruction procedures are described. Simulations are presented which demonstrate the resolving capability of the STAM system.
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© 1984 Plenum Press, New York
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Lin, ZC., Lee, H., Wade, G., Schueler, C.F. (1984). Computer-assisted Tomographic Acoustic Microscopy for Subsurface Imaging. In: Kaveh, M., Mueller, R.K., Greenleaf, J.F. (eds) Acoustical Imaging. Acoustical Imaging, vol 13. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-2779-0_9
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DOI: https://doi.org/10.1007/978-1-4613-2779-0_9
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