Abstract
Chemical vapor deposition (CVD), i.e. the deposition of a solid by a chemical reaction involving one or several gaseous chemical species and usually thermally activated, has been used for many years in different kinds of applications (e.g. oxidation or/and wear resistant coatings for cemented carbides, steels or alloys, preforms for drawing graded-index optical fibers, thin films for integrated circuits, coatings for nuclear fuels, etc...). In most cases, the substrates considered here have a rather simple shape and are made of non-porous materials.
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References
H.O. Pierson and M.L. Lieberman, The Chemical Vapor Deposition of Carbon on Carbon Fibers, Carbon, 13: 159 (1975)
F. Christin, R. Naslain and C. Bernard, A Thermodynamic and Experimental Approach of Silicon Carbide CVD. Application to the CVD-infiltration of Porous Carbon Composites, ijn Proc. 7th. Int. Conf. CVD (T.O. Sedwick and H. Lydin, eds.), p. 499, The Electrochem. Soc., Princeton (1979)
R. Naslain, J.V. Rossignol, P. Hagenmuller, F. Christin, L. Heraud ând J.J. Choury, Synthesis and Properties of New Composite Materials for High Temperature Applications Based on Carbon Fibers and C-SiC or C-TiC Hybrid Matrices, Rev. Chimie Minérale, 18: 544 (1981)
H. Hannache, J.Y. Rossignol, F. Langlais, R. Naslain and P. Hagenmuller. Boron-Carbide LPCVD from BCI3-CH4-H2 Gas Mixtures. Applications to the Synthesis of 2D-C-C/B4C Composite Materials by CVI, (submitted to J. Less- common Metals)
H. Hannache, R. Naslain and C. Bernard, Boron Nitride Chemical Vapour Infiltration of Fibrous Materials from BCl3-NH3-H2 or BF3-NH3 Mixtures. A Thermodynamic and Experimental Approach. J. Less-common Metals, 95: 221 (1983)
R. Colmet, I. Lhermitte-Sebire and R. Naslain. Fibrous Alumina-alumina Composite Materials obtained According to a CVI-Technique (submitted to J. Amer., Ceram. Soc.)
J.Y. Rossignol, J.M. Quenisset, H. Hannache, C. Mallet and R. Naslain. Mechanical Behavior in Compression Loading of 2D Composite Materials Made of Carbon Fabrics and a Ceramic Matrix (submitted to J. Mat. Science)
R. Colmet, R. Naslain, P. Hagenmuller and C. Bernard, Thermodynamic and Experimental Analysis of Chemical Vapor Deposition of Alumina from AlCl3-H2-CO2 Gas Phase Mixtures. J. Electrochem. Soc., 129: 1367 (1982)
J.Y. Rossignol, F. Langlais and R. Naslain. A Tentative Modelization of Titanium Carbide CVI within the Pore Network of Two-dimensional Carbon-carbon Composite Preforms. Proc. 9th. Int. Conf. CVD (Mc. D. Robinson et al., eds.), p. 596, The Electrochem. Soc., Pennington (1984)
I. Lhermitte-Sebire, R. Colmet, R. Naslain and C. Bernard, the CVD of Alumina from AlCl3-H2-CO2 on a Stoichiometric TiC Substrate : A Thermodynamic Approach (submitted to J. Less-common Metals)
E. Fitzer and D. Hegen, Chemical Vapor Deposition of Silicon Carbide and Silicon Nitride-Chemistry’s Contribution to Modern Silicon Ceramics, Angew Chem. Int. Ed. Engl., 18: 295 (1979)
V. Krukonis, Chemical Vapor Deposition of Boron Filament, in “Boron and Refractory Borides” (V.I. Matkovich, ed.), chap. Dj: 518, Springer-Ver- lag, Berlin-Heidelberg (1977)
R.L. Crane and V.J. Krukonis. Strength and Fracture Properties of Silicon Carbide Filament, Ceram. Bull., 54: 184 (1975)
F.W. Wawner, A.Y. Teng and S.R. Nutt, Microstructural Characterization of SiC (SCS) Filaments, SAMPE Quarterly, April: 39 (1983)
T.F. Foltz, SiC-Fibers for Advanced Ceramic Composites, private communication 1985
P. Martineau, M. Lahaye, R. Pailler, R. Naslain, M. Couzi and F. Cruege, SiC-Filament/Titanium Matrix Composites Regarded as Model Composites. 1. Filament Microanalysis and Strength Characterization, J. Mater. Sc., 19: 2731 (1984)
D. Morin, Boron Carbide-Coated Boron Filament as Reinforcement in Aluminium Alloy Matrices, J. Less-common Met., 47: 207 (1976)
L. Aggour, E. Fitzer, E. Ignotowitz and M. Sahebkar, Chemical Vapor Deposition of Pyrocarbon SiC, TiC, TiN, Si and Ta on Different Types of Carbon Fibres, Carbon, 12: 358 (1974)
W. Meyerer, D. Kizer and S. Paprocki, Versatility of Graphite-Aluminum Composites, Proc. Int. Conf. Comp. Mater. 2, Toronto, Apr. 16-20, B. Noton et al. eds., p. 141, TMS-AIME, Warrendale (Pa ), (1978)
E. Fitzer, Chemical Vapor Deposition of SiC and Si3N4, Proc. Int. Symp. on Factors in Densification and Sintering of Oxide and Non-oxide Ceramics, Hakone, Japan, p. 40 (1978)
E. Fitzer, D. Hegen and H. Strohmeier, Possibility of Gas Phase Impregnation with Silicon Carbide, Rev. Int. Hautes Temper. Refract., 17: 23 (1980)
E. Fitzer, W. Fritz and R. Gadow, Possibilities for Fibre Reinforcement of Silicon Carbide, Proc. Symp. on Advanced Ceramic Materials, Tokyo Institute of Technol., Yokohama, Oct. (1983)
H. Hannache, J.M. Quenisset, R. Naslain and L. Heraud, Composite Materials Made from a Porous 2D-Carbon-carbon Preform Densified with Boron Nitride by Chemical Vapor Infiltration, J. Mater. Sc., 19: 202 (1984)
C.H.J. Van den Breckel, R.M.M. Fonville, P.J.M. Van der Straten and G. Verspui, CVD of Ni, TiN and TiC on Complex Shapes, Proc. of 8th. Int. Conf. CVD (J.M. Blocher et al., eds.), p. 142, The Electrochem. Soc., Pennington (1981)
A.J. Caputo, W.J. Lackey and D.P. Stinton, Development of a New, Faster Process for the Fabrication of Ceramic Fiber-Reinforced Ceramic Composites by Chemical Vapor Infiltration, Proc. 9th. Annual Conf. Composites and Adv. Ceram. Mater., Cocoa Beach, Florida, Jan. (1985)
E. Fitzer, Carbon Based Composites, J. Chimie Physique, 81: 717 (1984)
P.J. Lamicq, Propriétés et Utilisations des Composites carbone-carbone, J. Chimie Physique, 81: 735 (1984)
J. Delmonte, Technology of Carbon and Graphite Fiber Composites, chap. 13, Van Nostrand Reinhold, New York (1981)
F. Christin, R. Naslain, P. Hagenmuller and J.J. Choury, Pièce poreuse carbonée densifiée in-situ par dépôt chimique en phase vapeur de matériaux réfractaires autres que le carbone et procédé de fabrication, Brevet français 77/26979, Sept. (1977)
L. Heraud, F. Christin, R. Naslain and P. Hagenmuller, Properties and Applications of Oxidation-Resistant Composite Materials obtained by SiC- Infiltration, Proc. of 8th. Int. Conf. CVD (J.M. Blocher et al., eds.), p. 782, The Electrochem. Soc., Pennington (1981)
M. Dauchier, P. Lamicq and J. Mace, Comportement thermomécanique des composites céramique-céramique, Rev. Int. Hautes Temp. Refract., 19: 285 (1982)
M. Dauchier, G. Bernhart and C. Bonnet, Properties of Silicon Carbide Based Ceramic-ceramic Composites, Proc. 30th. Nat. SAMPE, Anaheim (March 19-21, 1985 ), vol. 30, pp. 1519-1525, SAMPE, Covina (Cal.), 1985
G. Bernhart, P. Lamicq and J. Mace, Fiabilité des composites céramique- céramique, Industrie Céramique, 790: 51 (1985)
D. Neuilly, J.M. Quenisset, F. Langlais, R. Naslain and L. Heraud, private communication (1985).
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© 1986 Plenum Press, New York
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Naslain, R., Langlais, F. (1986). CVD-Processing of Ceramic-Ceramic Composite Materials. In: Tressler, R.E., Messing, G.L., Pantano, C.G., Newnham, R.E. (eds) Tailoring Multiphase and Composite Ceramics. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-2233-7_12
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DOI: https://doi.org/10.1007/978-1-4613-2233-7_12
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