Abstract
Two types of diffractive optics are used in soft X-ray optical systems—linear gratings, on either plane or shaped substrates, and zone plates. The former are employed in, for example, soft X-ray monochromators and spectrometers, while the latter are of use in image-forming systems such as microscopes and telescopes. The general properties of diffraction gratings have recently been comprehensively discussed,(1) and in this chapter only those features important for the soft X-ray region will be considered. Since grating efficiencies are more dependent on the smooth-ness than the profiles of the grooves,(1) this topic will be discussed in Chapter 7.
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© 1986 Plenum Press, New York
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Michette, A.G. (1986). Diffractive Optics I Diffraction Gratings. In: Optical Systems for Soft X Rays. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-2223-8_6
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DOI: https://doi.org/10.1007/978-1-4613-2223-8_6
Publisher Name: Springer, Boston, MA
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