Compositional Characterization Of Dielectric Oxides

Abstract

Many oxides containing transition metal elements are used in electronic and optical applications that require that they be insulating or transparent. The chemical criteria for such behavior are reviewed, and the strong effect of even very small changes in composition are emphasized. In some cases compositional changes in the ppm range can cause changes in electrical conductivity by many orders of magnitude. It is also indicated that in addition to oxides that are insulating after processing in air, there is another diverse family of oxides that are insulating only after chemical reduction. Very little is known about the properties of these materials but there is no reason to exclude them from possible applications.