Study of the Preparation and Properties of Ybacuo-Films
After the discovery of high-Tc superconductivity in LaBaCuO by Bednorz and Müller1 and the subsequent discovery of superconductivity above liquid nitrogen temperature in the YBaCuO-system by Chu et al.2, an immense push in the research efforts took place. Besides pure scientific aims a vast variety of industrial applications seems to be possible. A short while ago Nb3Ge was supposed to be the material with the highest Tc applicable to the superconducting electronics3,4. Now the new materials seem to be applicable too. In order to fabricate integrated superconducting devices from these materials one has to develop a thin film technique which yields films with a high Tc comparable to that of the bulk material5. Additionally the film properties should not be degraded during the lithographic process.
KeywordsElectron Spin Resonance Substrate Temperature Pure Argon Atmosphere 150nm Thickness Full Annealing
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