Acoustic Microscopy Using Amplitude and Phase Measurements
We have built a low-frequency scanning acoustic microscope (SAM) that measures both amplitude and phase. The majority of SAMs simply measure the amplitude of the reflected signal. Measuring the phase gives a great deal more information. For one thing, the phase is very sensitive to height variations. Measuring the phase also gives us the ability to do signal processing on the resulting images, such as removing the effects of surface features from defocused images of subsurface defects.
KeywordsQuartz Depression Convolution
Unable to display preview. Download preview PDF.
- 1.D. H. Kerns, J. Acoust. Soc. America 57 (2) (February 1975).Google Scholar
- 5.A. Atalar, J. Appl. Phys. 45, 5130–5139 (October 1979).Google Scholar
- 6.P. Reinholdtsen, W. W. Hipkiss, and B. T. Khuri-Yakub, Review of Progress in Quantitative Nondestructive Evaluation, D. O. Thompson and D. E. Chimenti, Eds., Plenum Press, 263 (1985).Google Scholar
- 7.See IEEE Trans, on Sonics and Ultrasonics, Special Issue on Acoustic Microscopy SU-32 (2), (March 1985 ).Google Scholar