Abstract
In this chapter we describe sources that have been used or are being developed for soft x-ray microscopy. The most important of these are synchrotron radiation, plasma sources, and microfocus sources. There are some further processes, such as transition radiation(1) and channelling radiation(2) which cause emission of soft X rays but, as yet, sources that use these have not been constructed. First, however, the difficulties in using conventional (electron-impact) sources are discussed.
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References
A. N. Chu, M. A. Piestrup, T. W. Barbee, R. H. Pantell, and F. R. Buskirk, “Observation of soft x-ray transition radiation from medium-energy electrons,” Rev. Sci. Instrum. 51, 597–601 (1980).
Y. A. Bazylev and N. K. Zhevago, “Intense electromagnetic radiation from relativistic electrons,” Sov. Phys. Usp. 25, 565–595 (1982).
A. H. Compton and S. K. Allison, X Rays in Theory and Experiment, 2nd ed., pp. 97–115, Van Nostrand, Princeton, NJ. (1935).
B. K. Agarwal, X-Ray Spectroscopy, Springer Series in Optical Sciences, Vol. 15, pp. 35–46, Springer, Berlin (1979).
A. H. Compton and S. K. Allison, X Rays in Theory and Experiment, 2nd ed., pp. 89–90, Van Nostrand, Princeton, N.J. (1935).
M. Green and V. E. Cosslett, “The efficiency of production of characteristic x-radiation in thick targets of a pure element,” Proc. Phys. Soc. London 78, 1206–1214 (1961).
M. Green, in: X-Ray Optics and Microanalysis ( A. Engstrom, V. Cosslett, and H. Pattee, eds.), pp. 185–192, Academic, London (1963).
M. Green, in: X-Ray Optics and Microanalysis ( A. Engstrom, V. Cosslett, and H. Pattee, eds.), pp. 361–377, Academic, London (1963).
A. A. Sokolov and J. M. Ternov, Synchrotron Radiation, Pergamon, Oxford (1968).
Y. Petroff, in: X-Ray Microscopy, Springer Series in Optical Sciences (G. Schmahl and D. Rudolph, eds.), Vol. 43, pp. 11–18, Springer, Berlin (1984).
J. D. Jackson, Classical Electrodynamics, 2nd ed., pp. 672–679, Wiley, New York (1975).
S. Krinsky, M. L. Perlman and R. E. Watson, in: Handbook on Synchrotron Radiation (E-E. Koch, ed.), Vol. 1, pp. 65–171, North-Holland, Amsterdam (1983).
G. N. Watson, A Treatise on the Theory of Bessel Functions, 2nd ed., University Press, Cambridge (1944).
V. L. Ginzburg and S. I. Syrovatskii, “Developments in the theory of synchrotron radiation,” Ann. Rev. Astron. Astrophys. 7, 375–420 (1969).
E-E. Koch, D. E. Eastman, and Y. Farge, in: Handbook on Synchrotron Radiation (E-E. Koch, ed.), Vol. 1, pp. 1–63, North-Holland, Amsterdam (1983).
R. L. Johnson, in: Handbook on Synchrotron Radiation (E-E. Koch, ed.), Vol. 1, pp. 173–260, North-Holland, Amsterdam (1983).
V. Saile and J. B. West, “VUV and soft x-ray monochromators for use with synchrotron radiation,” Nucl. Instrum. Methods 208, 199–213 (1983).
J. B. West and H. A. Padmore in: Handbook on Synchrotron (G. V. Marr, ed.), Vol. 2, pp. 21–120, Elsevier, Amsterdam (1988).
H. Rarback, J. M. Kenney, J. Kirz, M. R. Howells, P. Chang, P. J. Coane, R. Feder, P. J. Houzego, D. P. Kern, and D. Sayre D, in: X-Ray Microscopy, Springer Series in Optical Sciences (G. Schmahl and D. Rudolph, eds.), Vol. 43, pp. 203–216, Springer, Berlin (1984).
H. Rarback, D. Shu, S. C. Feng, H. Ade, J. Kirz, I. McNulty, D. P. Kern, T. H. P. Chang, Y. Vladimirsky, N. Iskander, D. Attwood, K. McQuaid, and S. Rothman, “Scanning x-ray microscope with 75-nm resolution,” Rev. Sci. Instrum. 59, 52–59 (1988).
G. R. Morrison, M. T. Browne, C. J. Buckley, R. E. Burge, R. C. Cave, P. Charalambous, P. J. Duke, A. R. Hare, C. P. B. Hills, J. M. Kenney, A. G. Michette, K. Ogawa, A. M. Rogoyski, and T. Taguchi, in: X-Ray Microscopy II (D. Sayre, M. Howells, J. Kirz, and H. Rarback, eds.), Springer, Berlin (1988)
H. Petersen and H. Baumgartel, “BESSY SX/700: A monochromator system covering the spectral range 3 eV < hv < 700 eV, ” Nucl. Instrum. Methods 172, 191–193
H. A. Padmore, P. J. Duke, R. E. Burge, and A. G. Michette, in: X-Ray Microscopy II (D. Sayre, M. Howells, J. Kirz, and H. Rarback, eds.), Springer Series in Optical Sciences, pp. 63–67, Springer, Berlin (1988).
A. G. Michette, Optical Systems for Soft X Rays, p. 55, Plenum, New York (1986).
E. Spiller in: Workshop on X-ray Instrumentation for Synchrotron Radiation Research (H. Winick and G. Brown, eds.), SSRL Report No. 78/04, pp. V144–V149 (1978).
A. G. Michette, Optical Systems for Soft X Rays, p. 253, Plenum, New York (1986).
D. Rudolph, B. Niemann, G. Schmahl, and O. Christ, in: X-Ray Microscopy, Springer Series in Optical Sciences (G. Schmahl and D. Rudolph, eds.), Vol. 43, pp. 192–202, Springer, Berlin (1984).
R. Tatchyn and I. Lindau, “New monochromator designs for the soft x-ray range,” Nucl. Instrum. Methods Phys. Res. 195, 163–173 (1982).
R. Tatchyn, I. Lindau, and P. L. Csonka, “Optimization of rectangular transmission gratings: Applications to new monochromator design,” Nucl. Instrum. Methods Phys. Res. 195, 239–243 (1982).
G. P. Williams, “Commercial synchrotron storage rings,” Synchrotron Radiation News 1 (2), 21–27 (1988).
M. L. Ginter, in: X-Ray Microscopy, Springer Series in Optical Sciences (G. Schmahl and D. Rudolph, eds.), Vol. 43, pp. 25–29, Springer, Berlin (1984).
J. A. Trail and R. L. Byer, “X-ray microscopy using multilayer optics with a laser-produced plasma source,” Applications of Thin-Film Multilayered Structures to Figured X-Ray Optics, Proc. SPIE 563, 90–97 (1985).
J. A. Trail and R. L. Byer, and J. B. Kortright, in: X-Ray Microscopy II (D. Sayre, M. Howells, J. Kirz, and H. Rarback, eds.), Springer Series in Optical Sciences, pp. 310–315, Springer, Berlin (1988).
A. G. Michette, R. E. Burge, A. M. Rogoyski, F. O’Neill, and I. C. E. Turcu, in: X-Ray Microscopy II (D. Sayre, M. Howells, J. Kirz, and H. Rarback, eds.), Springer Series in Optical Sciences, pp. 59–62, Springer, Berlin (1988).
R. A. McKorkle, in: Ultrasoft X-Ray Microscopy: Its Application to Biological and Physical Sciences (D. F. Parsons, ed.), Annals of the New York Academy of Science, Vol 342, pp. 53–64 (1980).
J. Bailey, Y. Ettinger, A. Fisher, and R. Feder, “Evaluation of the gas-puff z-pinch as an x-ray lithography and microscopy source,” Appl. Phys. Lett. 40, 33–35 (1982).
P. Choi, A. E. Dangor, and C. Deeney, “Small gas-puff z-pinch x-ray source,” Soft X-Ray Optics and Technology, Proc. SPIE 733, 52–57 (1986).
G. Herziger, in: X-Ray Microscopy, Springer Series in Optical Sciences (G. Schmahl and D. Rudolph, eds.), Vol. 43, pp. 19–24, Springer, Berlin (1984).
J. L. Bourgade, C. Cavailler, J. de Mascureau, and J. J. Miquel, “Pulsed soft x-ray source for laser-plasma diagnostic calibrations,” Rev. Sci. Instrum. 57, 2165–2167 (1986).
Y. Kato and S. H. Be, “Generation of soft X rays using a rare gas-hydrogen plasma focus and its application to x-ray lithography,” Appl. Phys. Lett. 48, 686–688 (1986).
A. G. Michette, P. C. Cheng, R. W. Eason, R. Feder, F. O’Neill, Y. Owadano, R. J. Rosser, P. T. Rumsby, and M. J. Shaw, “Soft x-ray contact microscopy using laser-plasma sources,” J. Phys. D: Appl. Phys. 19, 363–372 (1986).
P. C. Cheng, R. Feder, D. M. Shinozaki, K. H. Tan, R. W. Eason, A. Michette, and R. J. Rosser, “Soft x-ray contact microscopy,” Nucl. Instrum. Methods Phys. Res. A246, 668–674 (1986).
C. G. Willson in: Introduction to Microlithography, A.C.S. Symposium Series, Vol. 219, pp. 87–159 (1983).
R. Kodama, K. Okada, N. Ikeda, M. Mineo, K. A. Tanaka, T. Mochizuki, and C. Yamanaka, “Soft x-ray emission from w0, 2co0, and 4co0 laser-produced plasmas,” J. Appl. Phys. 59, 3050–3052 (1986).
A. G. Michette, C. P. B. Hills, A. M. Rogoyski, and P. Charalambous, “Laser-plasma sources for scanning x-ray microscopy,” Soft X-Ray Optics and Technology, Proc. SPIE 733, 28–33 (1986).
B. J. Panessa, R. A. McKorkle, P. Hoffman, J. B. Warren, and G. Coleman, “Ultrastructure of hydrated proteoglycans using a pulsed plasma source,” Ultramicroscopy 6, 139–148 (1981).
D. J. Pugh and P. D. West, in: Developments in Electron Microscopy and Analysis (D. L. Misell, ed.), I.O.P. Conference Series No. 36, pp. 29–32, The Institute of Physics, London (1977).
J. Anderson, X-Ray Microscopy Progress Report, National Physical Laboratory (UK) Report (1988).
A. Franks and B. Gale, in: X-Ray Microscopy, Springer Series in Optical Sciences (G. Schmahl and D. Rudolph, eds.), Vol. 43, pp. 129–138, Springer, Berlin (1984).
T. Mulvey and M. J. Wallington, “The focal properties and aberrations of magnetic electron lenses,” J. Phys. E: J. Sci. Instrum. 2, 466–472 (1969).
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© 1990 Plenum Press, New York
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Michette, A.G. (1990). Radiation Sources for X-Ray Microscopy. In: Duke, P.J., Michette, A.G. (eds) Modern Microscopies. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-1467-7_3
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DOI: https://doi.org/10.1007/978-1-4613-1467-7_3
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